Heon-Min Lee, H. Kim, Hyung-Kyu Choi, Hee Chul Lee, H. Hong, Don-Hee Lee, Joung-Uk Bu, E. Yoon
{"title":"一种基于片上微加热器的高灵敏度差分模微化学传感器，用于挥发性有机化合物(VOC)检测","authors":"Heon-Min Lee, H. Kim, Hyung-Kyu Choi, Hee Chul Lee, H. Hong, Don-Hee Lee, Joung-Uk Bu, E. Yoon","doi":"10.1109/MEMSYS.2006.1627843","DOIUrl":null,"url":null,"abstract":"In this paper, we first report the microchemical sensor application of differential-mode Thin Film Bulk Acoustic Resonators (TFBARs) for Volatile Organic Compound (VOC) detection. Using the micro heater element, the membrane temperature of TFBARs can be increased up to 250 oC. Generally, VOCs are decomposed to CO and CO2at the temperature of above 200oC, the additional reference oscillator without VOC adsorption can be simply realized by heating the membrane. The RF signal mixer is used to determine the shift in oscillation frequency between sensing and reference oscillators. The frequency responses and sensitivities to benzene, ethanol, and formaldehyde are tested and presented, respectively.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"55 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"A Highly-Sensitive Differential-Mode Microchemical Sensor Using TFBARs with On-Chip Microheater for Volatile Organic Compound (VOC) Detection\",\"authors\":\"Heon-Min Lee, H. Kim, Hyung-Kyu Choi, Hee Chul Lee, H. Hong, Don-Hee Lee, Joung-Uk Bu, E. Yoon\",\"doi\":\"10.1109/MEMSYS.2006.1627843\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we first report the microchemical sensor application of differential-mode Thin Film Bulk Acoustic Resonators (TFBARs) for Volatile Organic Compound (VOC) detection. Using the micro heater element, the membrane temperature of TFBARs can be increased up to 250 oC. Generally, VOCs are decomposed to CO and CO2at the temperature of above 200oC, the additional reference oscillator without VOC adsorption can be simply realized by heating the membrane. The RF signal mixer is used to determine the shift in oscillation frequency between sensing and reference oscillators. The frequency responses and sensitivities to benzene, ethanol, and formaldehyde are tested and presented, respectively.\",\"PeriodicalId\":250831,\"journal\":{\"name\":\"19th IEEE International Conference on Micro Electro Mechanical Systems\",\"volume\":\"55 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-05-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"19th IEEE International Conference on Micro Electro Mechanical Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2006.1627843\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"19th IEEE International Conference on Micro Electro Mechanical Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2006.1627843","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A Highly-Sensitive Differential-Mode Microchemical Sensor Using TFBARs with On-Chip Microheater for Volatile Organic Compound (VOC) Detection
In this paper, we first report the microchemical sensor application of differential-mode Thin Film Bulk Acoustic Resonators (TFBARs) for Volatile Organic Compound (VOC) detection. Using the micro heater element, the membrane temperature of TFBARs can be increased up to 250 oC. Generally, VOCs are decomposed to CO and CO2at the temperature of above 200oC, the additional reference oscillator without VOC adsorption can be simply realized by heating the membrane. The RF signal mixer is used to determine the shift in oscillation frequency between sensing and reference oscillators. The frequency responses and sensitivities to benzene, ethanol, and formaldehyde are tested and presented, respectively.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
