{"title":"用于CO/sub /测量的硅测热计和微可变红外滤波器","authors":"H. Hara, N. Kishi, H. Iwaoka","doi":"10.1109/OMEMS.2000.879664","DOIUrl":null,"url":null,"abstract":"We have developed silicon bolometers fabricated on an SOI wafer by bulk micromachining and a micro variable infrared filter, and have investigated CO/sub 2/ measurement using these elements as an NDIR system. The bolometer has a measured D* (1100 K, 10 Hz, 1 Hz) of 1.1/spl times/10/sup 8/ cmHz/sup 1/2//W. Two bolometers were combined with a micro variable infrared filter tuned to two different wavelengths: the CO/sub 2/ absorption band and the reference band. The two-wavelength NDIR system for combining these elements with the conventional infrared source was able to measure the concentration of CO/sub 2/ with the measurement reproducibility 3 /spl sigma/ of /spl plusmn/3.6% of the measured value or less between the concentrations of 0 ppm and 5000 ppm.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-07-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"Silicon bolometer and micro variable infrared filter for CO/sub 2/ measurement\",\"authors\":\"H. Hara, N. Kishi, H. Iwaoka\",\"doi\":\"10.1109/OMEMS.2000.879664\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have developed silicon bolometers fabricated on an SOI wafer by bulk micromachining and a micro variable infrared filter, and have investigated CO/sub 2/ measurement using these elements as an NDIR system. The bolometer has a measured D* (1100 K, 10 Hz, 1 Hz) of 1.1/spl times/10/sup 8/ cmHz/sup 1/2//W. Two bolometers were combined with a micro variable infrared filter tuned to two different wavelengths: the CO/sub 2/ absorption band and the reference band. The two-wavelength NDIR system for combining these elements with the conventional infrared source was able to measure the concentration of CO/sub 2/ with the measurement reproducibility 3 /spl sigma/ of /spl plusmn/3.6% of the measured value or less between the concentrations of 0 ppm and 5000 ppm.\",\"PeriodicalId\":148819,\"journal\":{\"name\":\"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-07-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2000.879664\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879664","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Silicon bolometer and micro variable infrared filter for CO/sub 2/ measurement
We have developed silicon bolometers fabricated on an SOI wafer by bulk micromachining and a micro variable infrared filter, and have investigated CO/sub 2/ measurement using these elements as an NDIR system. The bolometer has a measured D* (1100 K, 10 Hz, 1 Hz) of 1.1/spl times/10/sup 8/ cmHz/sup 1/2//W. Two bolometers were combined with a micro variable infrared filter tuned to two different wavelengths: the CO/sub 2/ absorption band and the reference band. The two-wavelength NDIR system for combining these elements with the conventional infrared source was able to measure the concentration of CO/sub 2/ with the measurement reproducibility 3 /spl sigma/ of /spl plusmn/3.6% of the measured value or less between the concentrations of 0 ppm and 5000 ppm.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
