{"title":"LOC封装DRAM模具表面裂纹的断口学分析","authors":"M. Mohanbabu, S. Y. Khim, E. Durai","doi":"10.1109/IPFA.1997.638214","DOIUrl":null,"url":null,"abstract":"This paper describes the surface crack on the Silicon die of a LOC packaged DRAM device. Surface crack was found to occur on the die at one edge, after reliability tests. The root cause was found to be the interaction of the LOC tape that exceed the die area covered by the protective PIX, and the scribe structures at the saw street due to thermal stress on the tape. This paper presents the fractographical analysis done on a failed unit to find the root cause, sample preparation needed, and the micrographs of the nature of the crack and the striations observed in the crack site using the optical microscope, SEM and the Laser Scan Microscope (LSM) confocal imaging.","PeriodicalId":159177,"journal":{"name":"Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"201 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Fractographic analysis on the die surface crack of a LOC packaged DRAM\",\"authors\":\"M. Mohanbabu, S. Y. Khim, E. Durai\",\"doi\":\"10.1109/IPFA.1997.638214\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper describes the surface crack on the Silicon die of a LOC packaged DRAM device. Surface crack was found to occur on the die at one edge, after reliability tests. The root cause was found to be the interaction of the LOC tape that exceed the die area covered by the protective PIX, and the scribe structures at the saw street due to thermal stress on the tape. This paper presents the fractographical analysis done on a failed unit to find the root cause, sample preparation needed, and the micrographs of the nature of the crack and the striations observed in the crack site using the optical microscope, SEM and the Laser Scan Microscope (LSM) confocal imaging.\",\"PeriodicalId\":159177,\"journal\":{\"name\":\"Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits\",\"volume\":\"201 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1997-07-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IPFA.1997.638214\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPFA.1997.638214","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fractographic analysis on the die surface crack of a LOC packaged DRAM
This paper describes the surface crack on the Silicon die of a LOC packaged DRAM device. Surface crack was found to occur on the die at one edge, after reliability tests. The root cause was found to be the interaction of the LOC tape that exceed the die area covered by the protective PIX, and the scribe structures at the saw street due to thermal stress on the tape. This paper presents the fractographical analysis done on a failed unit to find the root cause, sample preparation needed, and the micrographs of the nature of the crack and the striations observed in the crack site using the optical microscope, SEM and the Laser Scan Microscope (LSM) confocal imaging.