LOC封装DRAM模具表面裂纹的断口学分析

M. Mohanbabu, S. Y. Khim, E. Durai
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引用次数: 2

摘要

本文介绍了一种LOC封装DRAM器件的硅片表面裂纹问题。经可靠性试验,发现模具一侧边缘出现表面裂纹。根本原因被发现是LOC胶带的相互作用,超过了保护PIX覆盖的模具面积,以及由于胶带上的热应力而导致的锯街上的划线结构。本文介绍了用光学显微镜、扫描电镜和激光扫描显微镜(LSM)共聚焦成像对一个失效单元进行的断口分析,以找出根本原因,所需的样品制备,以及裂纹性质的显微照片和裂纹部位观察到的条纹。
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Fractographic analysis on the die surface crack of a LOC packaged DRAM
This paper describes the surface crack on the Silicon die of a LOC packaged DRAM device. Surface crack was found to occur on the die at one edge, after reliability tests. The root cause was found to be the interaction of the LOC tape that exceed the die area covered by the protective PIX, and the scribe structures at the saw street due to thermal stress on the tape. This paper presents the fractographical analysis done on a failed unit to find the root cause, sample preparation needed, and the micrographs of the nature of the crack and the striations observed in the crack site using the optical microscope, SEM and the Laser Scan Microscope (LSM) confocal imaging.
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