金-金互连到铜柱使用快速热压粘接使用非导电浆料

D. Frye, R. Guino, S. Gupta, M. Sano, K. Sato, K. Iida
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引用次数: 9

摘要

倒装晶片键合需要将器件翻转并连接到基板上的键合焊盘或迹线上。对于具有大型键合垫的低螺距设备,采用重力回流和毛细管下填充(CUF)来完成。对于在基板上彼此靠近安装的细间距器件,在热压键合(TCB)期间,CUF不如使用非导电浆料(NCP)有效。NCP在键合后测试期间提供可靠性,并确保牢固的晶片与基板键合。作者将描述一种新的NCP的配方,该NCP可为铜柱和金键合提供快速、可靠的键合。
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Gold-Gold Interconnects to Copper Pillar using fast Thermal Compression Bonding using Non-conductive paste
Flip chip bonding requires a device to be flipped and attached to the bond pads or traces on the substrate. For lower pitch devices with large bond pads, this was accomplished using gravity reflow followed by capillary underfill (CUF). For fine-pitch devices mounted close to each other on a substrate, CUF has not been as effective as the use of a Non-conductive paste (NCP) during Thermal Compression Bonding (TCB). The NCP provides reliability during post bonding testing and ensures a strong die to substrate bonding. The authors will describe the formulation of a new NCP that provides fast, reliable bonding for Copper Pillar and Gold Gold bonding.
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