用于x射线天文学的MEMS x射线光学系统的仿真设计

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607859

M. Koshiishi, Y. Ezoe, I. Mitsuishi, M. Mita, K. Mitsuda, T. Takano, R. Maeda

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摘要

利用MEMS技术设计了一种用于x射线天文学的超轻x射线光学器件。采用数值模拟方法对允许加工精度进行估算。所获得的x射线图像与设计一致。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Simulation-based design of a MEMS X-ray optic for X-ray astronomy

An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.

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2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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