{"title":"从分子结构理解玻璃自旋(SOG)性质","authors":"C. Chiang, D. Fraser","doi":"10.1109/VMIC.1989.78000","DOIUrl":null,"url":null,"abstract":"A summary of various types of SOG materials and their properties is presented. The authors correlate these properties with molecular structure and constituents such as phosphorous and methyl dopants. Process integration issues associated with each type of SOG material are also discussed.<<ETX>>","PeriodicalId":302853,"journal":{"name":"Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference","volume":"126 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1989-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":"{\"title\":\"Understanding of spin-on-glass (SOG) properties from their molecular structure\",\"authors\":\"C. Chiang, D. Fraser\",\"doi\":\"10.1109/VMIC.1989.78000\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A summary of various types of SOG materials and their properties is presented. The authors correlate these properties with molecular structure and constituents such as phosphorous and methyl dopants. Process integration issues associated with each type of SOG material are also discussed.<<ETX>>\",\"PeriodicalId\":302853,\"journal\":{\"name\":\"Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference\",\"volume\":\"126 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-06-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"14\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/VMIC.1989.78000\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/VMIC.1989.78000","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Understanding of spin-on-glass (SOG) properties from their molecular structure
A summary of various types of SOG materials and their properties is presented. The authors correlate these properties with molecular structure and constituents such as phosphorous and methyl dopants. Process integration issues associated with each type of SOG material are also discussed.<>
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