采用柔性MEMS传感器的手套形可穿戴设备

2022 International Conference on Electronics Packaging (ICEP) Pub Date : 2022-05-11 DOI:10.23919/ICEP55381.2022.9795402

Ayana Mizutani, S. Takamatsu, T. Itoh, Zymelka Maria, Takeshi Kobayashi

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引用次数: 2

摘要

利用超薄硅MEMS压阻应变传感器制造了一种可用于VR和手术辅助的手套形可穿戴设备。在本文中，我们提出了一种安装结构，可以减少传感器与布线之间连接处的应变集中。所提出的安装结构能够承受高达66.9%的应变。通过这种结构，我们成功地用构建的可穿戴设备测量手指的弯曲运动。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Glove-shaped wearable device using flexible MEMS sensor

An ultrathin Si MEMS piezoresistive strain sensor was used to fabricate a glove-shaped wearable device that can be used in VR and surgical assistance. In this paper, we proposed a mounting structure that reduces strain concentration at the connection between the sensor and the wiring. The proposed mounting structure was able to withstand strains of up to 66.9%. With this structure, we succeeded in measuring the bending motion of fingers with the constructed wearable device.

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2022 International Conference on Electronics Packaging (ICEP)

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