Topology Optimization for Micro Rotational Mirror Design and Safe Manufacturing

We present a new design procedure for a functional MEMS design and, simultaneously, for safe manufacturing. In order to verify our approach we chose a 2.5 D compliant rotational mirror as an example, which is fabricated in single crystal silicon. The design of this compliant mechanism is based on structural topology optimization [1] with subsequent modification by parameter optimization with a pseudo-rigid-body mode analysis [2]. The fabricated compliant mechanism has a linear input at the load point, which is pushed by a piezoelectric actuator, and a rotational output at the mirror section. This single crystal silicon mechanism achieves a rotational angle of 5° with a stationary rotational center at low frequency up to 50 Hz.