硅基共面波导的准透射电镜模型

Electrical Performance of Electronic Packaging Pub Date : 1997-10-01 DOI:10.1109/EPEP.1997.634076

D.F. Williams, M. Janezic, A. Ralston, R. S. List

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引用次数: 12

摘要

本文比较了在中等掺杂硅衬底上制作的共面波导的简单准透射电镜模型与测量结果。当共面波导电流和磁场不受衬底的影响时，一个简单的电容模型可以准确地解释衬底的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Quasi-TEM model for coplanar waveguide on silicon

This paper compares a simple quasi-TEM model for coplanar waveguide fabricated on moderately doped silicon substrates to measurement. While the coplanar waveguide currents and magnetic fields are unaffected by the substrate, a simple capacitive model can accurately account for the effects of the substrate.

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Electrical Performance of Electronic Packaging

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