后势垒缓冲层实现的InAlGaN/GaN hemt漏极电流恢复时间分析

S. Piotrowicz, C. Lacam, N. Michel, M. Oualli, O. Patard, S. Delage, C. Potier, J. Jacquet, J. Nallatamby, M. Prigent, P. Altuntas, E. Chartier, C. Dua, P. Gamarra
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引用次数: 1

摘要

本文介绍了在SiC衬底上以$0.15 \mu \ mathm {m}$栅长InAlGaN/GaN HEMT技术所获得的性能。该技术使用后阻挡缓冲层来确保通道中电子的限制,从而最大限度地减少HEMT器件在直流或射频脉冲下漏极电流的变化。当器件被提交到VDS, VGS或微波射频脉冲时,显示漏极电流恢复时间的测量结果。提出了与掺杂铁缓冲层设计的AlGaN/GaN HEMT结构的比较。
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Drain Current Recovery Time Analyses of InAlGaN/GaN HEMTs Realized with a Back-Barrier Buffer Layer
This article presents the performances obtained on a $0.15 \mu \mathrm{m}$ gate length InAlGaN/GaN HEMT technology on SiC substrate. This technology uses a back-barrier buffer layer to ensure the confinement of electrons in the channel, which minimizes variations of the drain current when the HEMT devices are submitted to DC or RF pulses. Measurements of the drain current recovery time are shown when the devices are submitted to VDS, VGS or microwave RF pulses. A comparison with an AlGaN/GaN HEMT structure designed with an iron doped buffer layer is proposed.
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