SEM/ sthm混合系统:电子器件高级热分析的新工具

Proceedings of the 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits (Cat. No.02TH8614) Pub Date : 2002-11-07 DOI:10.1109/IPFA.2002.1025657

A. Altes, I. Joachimsthaler, G. Zimmermann, R. Heiderhoff, L. Balk

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引用次数: 7

摘要

在扫描电子显微镜(SEM)的分析室中实现了一种基于电阻探针的扫描热显微镜(SThM)。通过这种混合系统热装置，可以检测到特定的特性。可以模拟可变点热源，并研究环境参数的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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SEM/SThM-hybrid-system: a new tool for advanced thermal analysis of electronic devices

A resistive probe based Scanning Thermal Microscope (SThM) was implemented in an analysis chamber of a Scanning Electron Microscope (SEM). By means of this hybrid-system thermal device, specific characteristics are detectable. Variable punctual heat sources can be simulated and the influence of ambient parameters can be investigated.

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Proceedings of the 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits (Cat. No.02TH8614)

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