大功率GaN HEMT灾难性前失效机制的识别

B. Huebschman, F. Crowne, A. Darwish, E. Viveiros, K. Kingkeo, N. Goldsman
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引用次数: 3

摘要

摘要该研究描述了对一种观察到的现象的调查,这种现象被认为与高功率、高频GaN hemt中栅极结构击穿引起的灾难性器件失效有关。在高温扩展可靠性试验站中,几个设备在灾难性故障之前显示出显著的栅极电流变化。为了在击穿过程中对器件进行电气检查,在晶圆上强调了类似的器件。每隔一段时间对这些设备进行详细的测量。在几种设备上,再现了感兴趣的行为。在进行的周期性测量中,栅极电流扫描提供了对器件操作的最大洞察。讨论了对观测到的现象的解释。
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Identification of Pre-Catastrophic Failure Mechanisms in High Power GaN HEMT
Abstract. The research describes an investigation into an observed phenomenon believed to be correlated with catastrophic device failure cause by the breakdown in the gate structure in high power, high frequency GaN HEMTs. Several devices that were stressed on an elevated temperature extended reliability test station showed significant changes in gate current prior to catastrophic failure. In an effort to electrically examine the devices during the breakdown process, similar devices were stressed on wafer. Detailed measurements were performed on the devices at regular intervals. On several devices, the behavior of interest was reproduced. Of the periodic measurements performed, a gate current sweep provided the greatest insight into device operation. Explanations for the observed phenomena are discussed.
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