{"title":"多工艺半导体制造设备性能分析","authors":"R. Atherton, F. Turner, L. F. Atherton, M. Pool","doi":"10.1109/ASMC.1990.111237","DOIUrl":null,"url":null,"abstract":"A general dynamic model of the cycle-time performance of production integrated processing equipment (PIPE) is discussed. This model has been used to analyze the performance of existing PIPE designs and to derive design enhancements. The performance predictions of the model are compared to measurements of PIPE operation. Case studies of PIPE operation indicate possible production advantages over conventional equipment.<<ETX>>","PeriodicalId":158760,"journal":{"name":"IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop","volume":"123 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1990-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"16","resultStr":"{\"title\":\"Performance analysis of multi-process semiconductor manufacturing equipment\",\"authors\":\"R. Atherton, F. Turner, L. F. Atherton, M. Pool\",\"doi\":\"10.1109/ASMC.1990.111237\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A general dynamic model of the cycle-time performance of production integrated processing equipment (PIPE) is discussed. This model has been used to analyze the performance of existing PIPE designs and to derive design enhancements. The performance predictions of the model are compared to measurements of PIPE operation. Case studies of PIPE operation indicate possible production advantages over conventional equipment.<<ETX>>\",\"PeriodicalId\":158760,\"journal\":{\"name\":\"IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop\",\"volume\":\"123 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1990-09-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"16\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ASMC.1990.111237\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC.1990.111237","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Performance analysis of multi-process semiconductor manufacturing equipment
A general dynamic model of the cycle-time performance of production integrated processing equipment (PIPE) is discussed. This model has been used to analyze the performance of existing PIPE designs and to derive design enhancements. The performance predictions of the model are compared to measurements of PIPE operation. Case studies of PIPE operation indicate possible production advantages over conventional equipment.<>
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