柔性塑料单晶硅CMOS

2008 9th International Conference on Solid-State and Integrated-Circuit Technology Pub Date : 2008-12-30 DOI:10.1109/ICSICT.2008.4734723

Z. Ma, Hao-Chih Yuan, G. Celler

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引用次数: 0

摘要

本文综述了塑料基板上柔性硅CMOS的材料、工艺和器件特性。首先描述了制备可转移单晶硅纳米膜的方法，然后描述了用于纳米膜的掺杂和转移技术。介绍了塑料基板上CMOS和逆变器的初步器件特性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Flexible plastic single-crystal si CMOS

In this paper, the materials, processing and device characteristics of flexible Si CMOS on plastic substrates are reviewed. The methods to create transferrable single-crystal Si nanomembranes are described first followed by the description of doping and transfer techniques developed for the nanomembranes. The preliminary device characteristics of CMOS and inverters on plastic substrates are presented.

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2008 9th International Conference on Solid-State and Integrated-Circuit Technology

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