E. Defay, G. Le Rhun, F. Perruchot, P. Rey, A. Suhm, M. Aid, L.J. Liu, S. Pacheco, M. Miller
{"title":"100nm范围的压电PZT薄膜:嵌入在低压器件中的执行器的解决方案","authors":"E. Defay, G. Le Rhun, F. Perruchot, P. Rey, A. Suhm, M. Aid, L.J. Liu, S. Pacheco, M. Miller","doi":"10.1109/MEMSYS.2009.4805458","DOIUrl":null,"url":null,"abstract":"This paper reports the piezoelectric properties of sputtered and sol gel PZT thin films investigated in a low thickness range (100-250nm). Piezoelectric-elastic bimorphs including very thin PZT films were realized and the maximum reachable deflection at 5V was characterized. The depoling effect experienced by the PZT versus the maximum post process temperature is also discussed which leads to the motivation of developing low thickness range PZT thin films. Elastic-piezoelectric bimorphs were realized and exhibited deflection higher than 5¿m at 5V. Moreover, these bimorphs showed only a 10% decrease of the deflection after 5 billions cycles.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"41 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":"{\"title\":\"Piezoelectric PZT Thin Films in the 100nm Range: A Solution for Actuators Embedded in Low Voltage Devices\",\"authors\":\"E. Defay, G. Le Rhun, F. Perruchot, P. Rey, A. Suhm, M. Aid, L.J. Liu, S. Pacheco, M. Miller\",\"doi\":\"10.1109/MEMSYS.2009.4805458\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports the piezoelectric properties of sputtered and sol gel PZT thin films investigated in a low thickness range (100-250nm). Piezoelectric-elastic bimorphs including very thin PZT films were realized and the maximum reachable deflection at 5V was characterized. The depoling effect experienced by the PZT versus the maximum post process temperature is also discussed which leads to the motivation of developing low thickness range PZT thin films. Elastic-piezoelectric bimorphs were realized and exhibited deflection higher than 5¿m at 5V. Moreover, these bimorphs showed only a 10% decrease of the deflection after 5 billions cycles.\",\"PeriodicalId\":187850,\"journal\":{\"name\":\"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems\",\"volume\":\"41 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-03-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"9\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2009.4805458\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2009.4805458","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Piezoelectric PZT Thin Films in the 100nm Range: A Solution for Actuators Embedded in Low Voltage Devices
This paper reports the piezoelectric properties of sputtered and sol gel PZT thin films investigated in a low thickness range (100-250nm). Piezoelectric-elastic bimorphs including very thin PZT films were realized and the maximum reachable deflection at 5V was characterized. The depoling effect experienced by the PZT versus the maximum post process temperature is also discussed which leads to the motivation of developing low thickness range PZT thin films. Elastic-piezoelectric bimorphs were realized and exhibited deflection higher than 5¿m at 5V. Moreover, these bimorphs showed only a 10% decrease of the deflection after 5 billions cycles.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
