AMHS的可互操作通信规范

2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) Pub Date : 2001-10-08 DOI:10.1109/ISSM.2001.962904

K. Andou, H. Kondo, T. Masui

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引用次数: 0

摘要

300mm半导体工厂需要来自不同供应商的不同类型的AMHS(自动物料搬运系统)组件的组合，以获得最佳的AMHS解决方案。为了实现这一目标，需要有可互操作的AMHS通信规范。Selete (Semiconductor Leading Edge Technologies, Inc)通过与Selete成员公司和AMHS合作供应商讨论实现级需求规范，并通过评估实现上述规范的AMHS组件的实际行为来确认其互操作性，开发了该规范。当来自两个或多个供应商的AMHS组件合并时，该规范有助于减少AMHS供应商和半导体制造商的通信接口开发成本和时间。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Interoperable communication specification for AMHS

300 mm semiconductor factories require the combination of different types of AMHS (Automated Material Handling System) components from different suppliers for optimal AMHS solutions. To realize it, interoperable communication specification for AMHS is required. Selete (Semiconductor Leading Edge Technologies, Inc) has developed it by discussing with member companies of Selete and cooperative AMHS vendors about implementation level requirement specifications, and confirming its interoperability by evaluating actual behaviors of AMHS components in which the above mentioned specifications are implemented. This specification contributes to reduce the cost and time of the communication interface development in AMHS vendors and semiconductor manufacturers when AMHS components from two or more vendors are combined.

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2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203)

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