采用各向异性导电膜的倒装片附件劣化机理及高可靠性设计技术

S. Fujiwara, M. Harada, Y. Fujita, T. Hachiya, M. Muramatsu
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引用次数: 9

摘要

将裸片直接连接到衬底上的倒装技术已经成为生产手机等小型电子产品的关键技术。特别是,利用Au凸点连接裸片和衬底的技术,在各向异性导电膜(ACF)的帮助下,是最有用的技术之一。目前ACF键合技术最严重的问题是连接点劣化机制不清楚。本研究的动机是阐明退化的机制,并建立在使用ACF的互连设计中获得可靠性的方法。
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Deterioration mechanism of flip chip attachment using an anisotropic conductive film and design technology for high reliability
The flip-chip technique, in which a bare chip is directly connected to a substrate, has become a key technology in producing compact electronic products, including cellular phones. In particular, the technique of using Au bumps to connect the bare chip with the substrate, with the aid of an anisotropic conductive film (ACF), is one of the most useful technologies. The most serious problem with ACF bonding technology today is that the deterioration mechanism of interconnections is not clear. This study is motivated to clarify the mechanism of deterioration and to establish the method of obtaining reliability in the design of interconnections for which ACF is used.
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