imec的SiGe-MEMS平台上的三角形RF MEMS开关气隙电容器

2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) Pub Date : 2013-04-14 DOI:10.1109/EUROSIME.2013.6529973

M. Bedier, X. Rottenberg, V. Rochus, R. Abdelrassoul, H. Tilmans

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引用次数: 0

摘要

无源元件，如可调谐电容器，在电压控制振荡器(VCO)和可切换或可调谐滤波器等无线通信应用中是非常需要的。本文采用imec公司的SiGe-MEMS技术，设计并建模了一种三角形RF-MEMS开关气隙电容器。实现了低驱动电压(100)。采用蛇形悬架构建低刚度(小于0.07 N/m)结构，实现低驱动电压。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Triangular-shaped RF MEMS switched air gap capacitor in imec's SiGe-MEMS platform

Passive elements such as tunable capacitors are highly needed in wireless communication applications such as Voltage Controlled Oscillators (VCO) and switchable or tunable filters. In this paper, the design and modeling of a triangular shaped RF-MEMS switched air-gap capacitor using imec's SiGe-MEMS technology is presented. Low actuation voltage (<; 3 Volts), a capacitance ratio of around 7, an up-state capacitance of 20 fF and a high electrical quality factor (> 100) were achieved. A serpentine suspension was employed to build a low stiffness (less than 0.07 N/m) structure capable of achieving the low actuation voltage.

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2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

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