伪晶Ga/sub 0.18/In/sub 0.82/P/InP/Ga/sub 0.47/In/sub 0.53/As HEMT的低温直流特性

S. Loualiche, A. Ginudi, A. Le Corre, D. Lecrosnier, C. Vaudry, L. Henry, C. Guillemot
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引用次数: 1

摘要

采用高间隙应变GaInP材料提高了InP上的肖特基势垒高度。这是GaInP首次被用于制造InP的高电子迁移率晶体管(HEMT)。对于这些器件,1.3 μ m栅极HEMT的最佳g/sub /为300 mS/mm。在低温(100 ~ 293 K)条件下研究了栅极长度为3 μ m的晶体管,其直流特性在冷却后得到改善。与AlGaAs/GaAs异质结构不同,该异质结构在较低温度下不会发生g/sub - m/或I/sub - ds/塌缩,且在105 K时g/sub - m/ +54%。
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Low temperature DC characteristics of pseudomorphic Ga/sub 0.18/In/sub 0.82/P/InP/Ga/sub 0.47/In/sub 0.53/As HEMT
A high-gap strained GaInP material has been used to increase Schottky barrier height on InP. This is the first time GaInP has been used for high-electron-mobility transistor (HEMT) fabrication of InP. For these devices the best g/sub m/ for a 1.3- mu m gate HEMT is 300 mS/mm. Transistors of 3- mu m gate length have been studied at low temperature (100 K to 293 K). Their DC electrical characteristics improve upon cooling. The best improvement is obtained at the lowest temperature (+54% for g/sub m/ at 105 K). The structure is stable and does not undergo g/sub m/ or I/sub ds/ collapse at lower temperature, unlike AlGaAs/GaAs heterostructures.<>
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Expertise, optimisation and control of InP and related technologies by scanning photoluminescence measurements Dislocation density after S-diffusion into p-type InP substrates Surface recombination and high efficiency in InP solar cells Molecular beam epitaxial growth techniques for graded-composition InGaAlAs/InP alloys Submicron double heterojunction strained InAlAs/InGaAs HEMTs: an experimental study of DC and microwave properties
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