{"title":"使用 Thermo Scientific 公司的 K-Alpha 仪器，在 60 和 200 eV 的通过能量下通过 XPS 分析金属铜","authors":"Annika M. Dean, Samira Jafari, M. Linford","doi":"10.1116/6.0002958","DOIUrl":null,"url":null,"abstract":"Copper metal was analyzed by x-ray photoelectron spectroscopy (XPS) using a K-Alpha instrument from Thermo Scientific that employed an Al K-alpha x-ray source (1486.6 eV). The sample was the copper standard on the instrument sample stage that was sputtered with Ar+ to remove its oxide layer and hydrocarbon contamination. Shown in this work are the survey spectrum and high-resolution Cu 2p, Cu L3M45M45, Cu 3s, Cu 3p, O 1s, C 1s, and Ar 2p narrow scans. Narrow and survey scans were collected at 60 and 200 eV pass energy, respectively.","PeriodicalId":22006,"journal":{"name":"Surface Science Spectra","volume":"90 1","pages":""},"PeriodicalIF":1.6000,"publicationDate":"2023-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Analysis of copper metal with a K-Alpha instrument from Thermo Scientific by XPS at 60 and 200 eV pass energy\",\"authors\":\"Annika M. Dean, Samira Jafari, M. Linford\",\"doi\":\"10.1116/6.0002958\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Copper metal was analyzed by x-ray photoelectron spectroscopy (XPS) using a K-Alpha instrument from Thermo Scientific that employed an Al K-alpha x-ray source (1486.6 eV). The sample was the copper standard on the instrument sample stage that was sputtered with Ar+ to remove its oxide layer and hydrocarbon contamination. Shown in this work are the survey spectrum and high-resolution Cu 2p, Cu L3M45M45, Cu 3s, Cu 3p, O 1s, C 1s, and Ar 2p narrow scans. Narrow and survey scans were collected at 60 and 200 eV pass energy, respectively.\",\"PeriodicalId\":22006,\"journal\":{\"name\":\"Surface Science Spectra\",\"volume\":\"90 1\",\"pages\":\"\"},\"PeriodicalIF\":1.6000,\"publicationDate\":\"2023-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Surface Science Spectra\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0002958\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Surface Science Spectra","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0002958","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
引用次数: 0
摘要
利用 Thermo Scientific 公司的 K-Alpha 仪器，采用 Al K-α X 射线源（1486.6 eV），通过 X 射线光电子能谱 (XPS) 分析金属铜。样品是仪器样品台上的铜标准样品，用 Ar+ 进行溅射以去除其氧化层和碳氢化合物污染。本研究中显示的是勘测光谱和高分辨率 Cu 2p、Cu L3M45M45、Cu 3s、Cu 3p、O 1s、C 1s 和 Ar 2p 窄扫描。窄扫描和勘测扫描分别在 60 和 200 eV 的通过能量下采集。
Analysis of copper metal with a K-Alpha instrument from Thermo Scientific by XPS at 60 and 200 eV pass energy
Copper metal was analyzed by x-ray photoelectron spectroscopy (XPS) using a K-Alpha instrument from Thermo Scientific that employed an Al K-alpha x-ray source (1486.6 eV). The sample was the copper standard on the instrument sample stage that was sputtered with Ar+ to remove its oxide layer and hydrocarbon contamination. Shown in this work are the survey spectrum and high-resolution Cu 2p, Cu L3M45M45, Cu 3s, Cu 3p, O 1s, C 1s, and Ar 2p narrow scans. Narrow and survey scans were collected at 60 and 200 eV pass energy, respectively.
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