氧化对中红外波长基于多孔硅层的集成波导光学特性的影响

IF 2.5 3区 物理与天体物理 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Photonics and Nanostructures-Fundamentals and Applications Pub Date : 2024-02-01 DOI:10.1016/j.photonics.2024.101244
A. Jaafar, S. Meziani, A. Hammouti, P. Pirasteh, N. Lorrain, L. Bodiou, M. Guendouz, J. Charrier
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引用次数: 0

摘要

基于导引光学器件的集成传感器可以利用中红外(mid-IR)光谱范围内分子的振动和旋转模式,高效、选择性地探测这些分子。在这项工作中,通过电化学蚀刻和光刻工艺开发了一种基于多孔硅(PSi)层的脊波导。这种脊波导能够传播中红外波段(3.90-4.35 微米)的光,光损耗约为 10 dB/cm。为了稳定多孔结构并确定最佳氧化度,对基于 PSi 材料的脊波导进行了氧化研究,以使中红外光能够在脊波导中传播,从而实现传感应用。结果表明,脊波导在 300 ℃ 和 600 ℃(氧化度分别为 15%和 36%)下部分氧化后仍能传播光,在 4.1 µm 波长处的光损耗分别约为 30 dB/cm 和 60 dB/cm。
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Oxidation effect on optical properties of integrated waveguides based on porous silicon layers at mid-infrared wavelength

Integrated sensors based on guided optical devices can efficiently and selectively detect molecules in the mid-infrared (mid-IR) spectral range, exploiting the vibrational and rotational modes of these molecules at these wavelengths. In this work, a ridge waveguide based on porous silicon (PSi) layers was developed by electrochemical etching followed by a photolithographic process. The ridge waveguide is capable of propagating light in the mid-IR range (3.90–4.35 µm) with optical losses of approximately 10 dB/cm. An oxidation study was performed to stabilize the porous structure and identify the optimal oxidation degree, that allow mid-IR light to propagate in a ridge waveguide based on PSi material for sensing application. The results showed that the ridge waveguide remains capable of propagating light after undergoing partial oxidation at 300 °C and 600 °C (15% and 36% of the oxidation degree respectively) with optical losses of around 30 dB/cm and 60 dB/cm at the wavelength of 4.1 µm, respectively.

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来源期刊
CiteScore
5.00
自引率
3.70%
发文量
77
审稿时长
62 days
期刊介绍: This journal establishes a dedicated channel for physicists, material scientists, chemists, engineers and computer scientists who are interested in photonics and nanostructures, and especially in research related to photonic crystals, photonic band gaps and metamaterials. The Journal sheds light on the latest developments in this growing field of science that will see the emergence of faster telecommunications and ultimately computers that use light instead of electrons to connect components.
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