A. Jaafar, S. Meziani, A. Hammouti, P. Pirasteh, N. Lorrain, L. Bodiou, M. Guendouz, J. Charrier
{"title":"氧化对中红外波长基于多孔硅层的集成波导光学特性的影响","authors":"A. Jaafar, S. Meziani, A. Hammouti, P. Pirasteh, N. Lorrain, L. Bodiou, M. Guendouz, J. Charrier","doi":"10.1016/j.photonics.2024.101244","DOIUrl":null,"url":null,"abstract":"<div><p>Integrated sensors based on guided optical devices can efficiently and selectively detect molecules in the mid-infrared (mid-IR) spectral range, exploiting the vibrational and rotational modes of these molecules at these wavelengths. In this work, a ridge waveguide based on porous silicon (PSi) layers was developed by electrochemical etching followed by a photolithographic process. The ridge waveguide is capable of propagating light in the mid-IR range (3.90–4.35 µm) with optical losses of approximately 10 dB/cm. An oxidation study was performed to stabilize the porous structure and identify the optimal oxidation degree, that allow mid-IR light to propagate in a ridge waveguide based on PSi material for sensing application. The results showed that the ridge waveguide remains capable of propagating light after undergoing partial oxidation at 300 °C and 600 °C (15% and 36% of the oxidation degree respectively) with optical losses of around 30 dB/cm and 60 dB/cm at the wavelength of 4.1 µm, respectively.</p></div>","PeriodicalId":49699,"journal":{"name":"Photonics and Nanostructures-Fundamentals and Applications","volume":null,"pages":null},"PeriodicalIF":2.5000,"publicationDate":"2024-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Oxidation effect on optical properties of integrated waveguides based on porous silicon layers at mid-infrared wavelength\",\"authors\":\"A. Jaafar, S. Meziani, A. Hammouti, P. Pirasteh, N. Lorrain, L. Bodiou, M. Guendouz, J. Charrier\",\"doi\":\"10.1016/j.photonics.2024.101244\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Integrated sensors based on guided optical devices can efficiently and selectively detect molecules in the mid-infrared (mid-IR) spectral range, exploiting the vibrational and rotational modes of these molecules at these wavelengths. In this work, a ridge waveguide based on porous silicon (PSi) layers was developed by electrochemical etching followed by a photolithographic process. The ridge waveguide is capable of propagating light in the mid-IR range (3.90–4.35 µm) with optical losses of approximately 10 dB/cm. An oxidation study was performed to stabilize the porous structure and identify the optimal oxidation degree, that allow mid-IR light to propagate in a ridge waveguide based on PSi material for sensing application. The results showed that the ridge waveguide remains capable of propagating light after undergoing partial oxidation at 300 °C and 600 °C (15% and 36% of the oxidation degree respectively) with optical losses of around 30 dB/cm and 60 dB/cm at the wavelength of 4.1 µm, respectively.</p></div>\",\"PeriodicalId\":49699,\"journal\":{\"name\":\"Photonics and Nanostructures-Fundamentals and Applications\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":2.5000,\"publicationDate\":\"2024-02-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Photonics and Nanostructures-Fundamentals and Applications\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S1569441024000191\",\"RegionNum\":3,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Photonics and Nanostructures-Fundamentals and Applications","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1569441024000191","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Oxidation effect on optical properties of integrated waveguides based on porous silicon layers at mid-infrared wavelength
Integrated sensors based on guided optical devices can efficiently and selectively detect molecules in the mid-infrared (mid-IR) spectral range, exploiting the vibrational and rotational modes of these molecules at these wavelengths. In this work, a ridge waveguide based on porous silicon (PSi) layers was developed by electrochemical etching followed by a photolithographic process. The ridge waveguide is capable of propagating light in the mid-IR range (3.90–4.35 µm) with optical losses of approximately 10 dB/cm. An oxidation study was performed to stabilize the porous structure and identify the optimal oxidation degree, that allow mid-IR light to propagate in a ridge waveguide based on PSi material for sensing application. The results showed that the ridge waveguide remains capable of propagating light after undergoing partial oxidation at 300 °C and 600 °C (15% and 36% of the oxidation degree respectively) with optical losses of around 30 dB/cm and 60 dB/cm at the wavelength of 4.1 µm, respectively.
期刊介绍:
This journal establishes a dedicated channel for physicists, material scientists, chemists, engineers and computer scientists who are interested in photonics and nanostructures, and especially in research related to photonic crystals, photonic band gaps and metamaterials. The Journal sheds light on the latest developments in this growing field of science that will see the emergence of faster telecommunications and ultimately computers that use light instead of electrons to connect components.