{"title":"重复短路测试下硅/碳化硅级联器件的退化机理研究","authors":"Qiusheng Zhang;Hangzhi Liu;Yuming Zhou","doi":"10.1109/OJPEL.2024.3370712","DOIUrl":null,"url":null,"abstract":"The Si/SiC Cascode device has been widely accepted in various applications, however, its reliability issue still remains a major concern and needs to be extensively investigated. In this paper, the degradation of a 750 V Si/SiC Cascode device under repetitive short-circuit (SC) tests is investigated at 400 V DC-link voltage. Static and dynamic characteristics are measured before and after the repetitive SC cycles. As the SC cycle increases, the degradation of the device becomes gradually significant. By linking changes in electrical properties to metallization degradation, the physical mechanism of device degradation has been uncovered in depth. Experimental results show that the continuous stress under repetitive SC cycle leads to an increase in the on-state resistance of Si/SiC Cascode device. Finite-element-model (FEM) simulations show that due to the pad current crowding in the source region, the source Al metallization temperature of the SiC JFET rapidly increases to the melting point and undergoes reconstruction, resulting in a significant increase in the source Al metallization resistance. In addition, it is found by scanning electron microscopy (SEM) that the gate metal aluminum of SiC JFET chip also undergoes reconstruction, which is the reason for the degradation of the dynamic characteristics. The research in this paper will provide useful evidences for device manufactures to design Si/SiC Cascode device with high reliability.","PeriodicalId":93182,"journal":{"name":"IEEE open journal of power electronics","volume":null,"pages":null},"PeriodicalIF":5.0000,"publicationDate":"2024-02-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10449481","citationCount":"0","resultStr":"{\"title\":\"Investigation on the Degradation Mechanism of Si/SiC Cascode Device Under Repetitive Short-Circuit Tests\",\"authors\":\"Qiusheng Zhang;Hangzhi Liu;Yuming Zhou\",\"doi\":\"10.1109/OJPEL.2024.3370712\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The Si/SiC Cascode device has been widely accepted in various applications, however, its reliability issue still remains a major concern and needs to be extensively investigated. In this paper, the degradation of a 750 V Si/SiC Cascode device under repetitive short-circuit (SC) tests is investigated at 400 V DC-link voltage. Static and dynamic characteristics are measured before and after the repetitive SC cycles. As the SC cycle increases, the degradation of the device becomes gradually significant. By linking changes in electrical properties to metallization degradation, the physical mechanism of device degradation has been uncovered in depth. Experimental results show that the continuous stress under repetitive SC cycle leads to an increase in the on-state resistance of Si/SiC Cascode device. Finite-element-model (FEM) simulations show that due to the pad current crowding in the source region, the source Al metallization temperature of the SiC JFET rapidly increases to the melting point and undergoes reconstruction, resulting in a significant increase in the source Al metallization resistance. In addition, it is found by scanning electron microscopy (SEM) that the gate metal aluminum of SiC JFET chip also undergoes reconstruction, which is the reason for the degradation of the dynamic characteristics. The research in this paper will provide useful evidences for device manufactures to design Si/SiC Cascode device with high reliability.\",\"PeriodicalId\":93182,\"journal\":{\"name\":\"IEEE open journal of power electronics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":5.0000,\"publicationDate\":\"2024-02-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10449481\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE open journal of power electronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10449481/\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE open journal of power electronics","FirstCategoryId":"1085","ListUrlMain":"https://ieeexplore.ieee.org/document/10449481/","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
摘要
硅/碳化硅级联器件在各种应用中已被广泛接受,但其可靠性问题仍是一个主要问题,需要进行广泛研究。本文研究了在 400 V 直流链路电压下,750 V Si/SiC 级联器件在重复短路(SC)测试中的劣化情况。在重复短路周期前后测量了静态和动态特性。随着 SC 周期的增加,器件的劣化逐渐显著。通过将电特性变化与金属化退化联系起来,深入揭示了器件退化的物理机制。实验结果表明,重复 SC 循环下的持续应力会导致 Si/SiC 级联器件的导通电阻增加。有限元模型(FEM)仿真显示,由于源极区域的焊盘电流拥挤,SiC JFET 的源极铝金属化温度迅速升高至熔点并发生重构,导致源极铝金属化电阻显著增加。此外,通过扫描电子显微镜(SEM)发现,SiC JFET 芯片的栅极金属铝也发生了重构,这是动态特性下降的原因。本文的研究将为器件制造商设计具有高可靠性的 Si/SiC 级联器件提供有用的证据。
Investigation on the Degradation Mechanism of Si/SiC Cascode Device Under Repetitive Short-Circuit Tests
The Si/SiC Cascode device has been widely accepted in various applications, however, its reliability issue still remains a major concern and needs to be extensively investigated. In this paper, the degradation of a 750 V Si/SiC Cascode device under repetitive short-circuit (SC) tests is investigated at 400 V DC-link voltage. Static and dynamic characteristics are measured before and after the repetitive SC cycles. As the SC cycle increases, the degradation of the device becomes gradually significant. By linking changes in electrical properties to metallization degradation, the physical mechanism of device degradation has been uncovered in depth. Experimental results show that the continuous stress under repetitive SC cycle leads to an increase in the on-state resistance of Si/SiC Cascode device. Finite-element-model (FEM) simulations show that due to the pad current crowding in the source region, the source Al metallization temperature of the SiC JFET rapidly increases to the melting point and undergoes reconstruction, resulting in a significant increase in the source Al metallization resistance. In addition, it is found by scanning electron microscopy (SEM) that the gate metal aluminum of SiC JFET chip also undergoes reconstruction, which is the reason for the degradation of the dynamic characteristics. The research in this paper will provide useful evidences for device manufactures to design Si/SiC Cascode device with high reliability.