用氦区平板显微镜进行反射成像

IF 2.1 3区 工程技术 Q2 MICROSCOPY Ultramicroscopy Pub Date : 2024-03-25 DOI:10.1016/j.ultramic.2024.113961
Ranveig Flatabø , Sabrina D. Eder , Thomas Reisinger , Gianangelo Bracco , Peter Baltzer , Björn Samelin , Bodil Holst
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引用次数: 0

摘要

中性氦原子显微镜是一种新型显微镜技术,可提供严格的表面敏感、非破坏性成像。近年来发表了一些实验,通过扫描表面上的氦光束光斑,记录相对于整个表面法线的固定总散射角θSD和固定入射角θi的散射强度变化,从而获得图像。这些实验使用通过准直光束获得的光斑(称为氦针孔显微镜)。另外,也可以通过原子光学元件聚焦光束来产生光斑。不过,迄今为止,聚焦氦光束的成像只在透射(使用区域板)情况下进行过演示。在此,我们首次展示了利用聚焦氦光束(同样使用区域板)获得的反射图像。获得的图像光斑尺寸(FWHM)小至 4.7μm ±0.5μm,我们还演示了聚焦后的光斑尺寸小至约 1μm。此外,我们还介绍了测量聚焦氦光束光斑散射分布的实验。实验是通过改变射入光束的角度θi来完成的,同时保持光束-探测器角度θSD和光束光斑撞击表面的点固定不变--实质上,这是标准氦原子散射实验在显微镜尺度上的实现。我们的实验使用的是专门为氦显微镜开发的可调节信号累积的电子轰击探测器。
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Reflection imaging with a helium zone plate microscope

Neutral helium atom microscopy is a novel microscopy technique which offers strictly surface-sensitive, non-destructive imaging. Several experiments have been published in recent years where images are obtained by scanning a helium beam spot across a surface and recording the variation in scattered intensity at a fixed total scattering angle θSD and fixed incident angle θi relative to the overall surface normal. These experiments used a spot obtained by collimating the beam (referred to as helium pinhole microscopy). Alternatively, a beam spot can be created by focusing the beam with an atom optical element. However up till now imaging with a focused helium beam has only been demonstrated in transmission (using a zone plate). Here we present the first reflection images obtained with a focused helium beam (also using a zone plate). Images are obtained with a spot size (FWHM) down to 4.7μm ±0.5μm, and we demonstrate focusing down to a spot size of about 1μm. Furthermore, we present experiments measuring the scattering distribution from a focused helium beam spot. The experiments are done by varying the incoming beam angle θi while keeping the beam-detector angle θSD and the point where the beam spot hits the surface fixed - in essence, a microscopy scale realization of a standard helium atom scattering experiment. Our experiments are done using an electron bombardment detector with adjustable signal accumulation, developed particularly for helium microscopy.

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来源期刊
Ultramicroscopy
Ultramicroscopy 工程技术-显微镜技术
CiteScore
4.60
自引率
13.60%
发文量
117
审稿时长
5.3 months
期刊介绍: Ultramicroscopy is an established journal that provides a forum for the publication of original research papers, invited reviews and rapid communications. The scope of Ultramicroscopy is to describe advances in instrumentation, methods and theory related to all modes of microscopical imaging, diffraction and spectroscopy in the life and physical sciences.
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