用于植入式神经探针的穿透聚合物、穿透技术、柔性、轻质和集成装置

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION Microsystems & Nanoengineering Pub Date : 2024-04-22 DOI:10.1038/s41378-024-00691-8
Cunkai Zhou, Ye Tian, Gen Li, Yifei Ye, Lusha Gao, Jiazhi Li, Ziwei Liu, Haoyang Su, Yunxiao Lu, Meng Li, Zhitao Zhou, Xiaoling Wei, Lunming Qin, Tiger H. Tao, Liuyang Sun
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引用次数: 0

摘要

在植入式电生理记录系统中,头台通常包括与脑组织连接的神经探针和用于信号处理的集成电路芯片。虽然 MEMS 和 CMOS 技术的进步大大改善了这些组件,但它们之间的互连仍然依赖于传统的印刷电路板和复杂的适配器。这种传统方法大大增加了封装的重量和体积,尤其是对于高通道数系统而言。为解决这一问题,我们受先进三维封装中硅通孔(TSV)技术的启发,开发了一种聚合物通孔(TPV)方法。这一创新实现了柔性探针、放大器芯片和印刷电路板的垂直集成,从而实现了柔性、轻质和集成器件(FLID)。FLID 的总重量仅为依靠适配器的传统同类产品的 25%,这大大提高了佩戴 FLID 的动物的活动水平,使其几乎达到没有植入物的对照组动物的水平。此外,通过采用铂铱合金作为电接触的顶层材料,FLID 实现了卓越的电学性能,可以在体内测量局部场电位和单个神经元的动作电位。这些发现展示了 FLID 在扩大植入式神经记录系统方面的潜力,标志着神经技术领域的重大进展。
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Through-polymer, via technology-enabled, flexible, lightweight, and integrated devices for implantable neural probes

In implantable electrophysiological recording systems, the headstage typically comprises neural probes that interface with brain tissue and integrated circuit chips for signal processing. While advancements in MEMS and CMOS technology have significantly improved these components, their interconnection still relies on conventional printed circuit boards and sophisticated adapters. This conventional approach adds considerable weight and volume to the package, especially for high channel count systems. To address this issue, we developed a through-polymer via (TPV) method inspired by the through-silicon via (TSV) technique in advanced three-dimensional packaging. This innovation enables the vertical integration of flexible probes, amplifier chips, and PCBs, realizing a flexible, lightweight, and integrated device (FLID). The total weight of the FLIDis only 25% that of its conventional counterparts relying on adapters, which significantly increased the activity levels of animals wearing the FLIDs to nearly match the levels of control animals without implants. Furthermore, by incorporating a platinum-iridium alloy as the top layer material for electrical contact, the FLID realizes exceptional electrical performance, enabling in vivo measurements of both local field potentials and individual neuron action potentials. These findings showcase the potential of FLIDs in scaling up implantable neural recording systems and mark a significant advancement in the field of neurotechnology.

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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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