{"title":"集成式低电感 GaN eHEMT 功率模块的热循环特性分析","authors":"Zhongchao Sun, Masaki Takahashi, Wendi Guo, Stig Munk-Nielsen, Asger Bjørn Jørgensen","doi":"10.1016/j.microrel.2024.115482","DOIUrl":null,"url":null,"abstract":"<div><p>To exploit the potential of wide-bandgap semiconductors in high-frequency applications, innovative packaging designs are developed to minimize the parasitic inductance of power modules. This study presents an integrated power module with a hybrid PCB/DBC structure, which uses top-side cooling prepackaged GaN enhancement-mode high-electron-mobility transistors. The module achieves a remarkably low parasitic inductance of 2.65 nH. However, there is relatively scarce research on the reliability of this heterostructure, particularly its sensitivity to thermomechanical stress due to the coefficients of thermal expansion mismatch among material interfaces. In this work, the thermal cycling characteristics of the integrated power module are comprehensively investigated. Electrical and thermal parameters were periodically and separately measured offline on a simplified package to monitor the health conditions and decouple possible synergy and competition effects among the failure modes from all packaging components. A thorough failure analysis was conducted using nondestructive visual inspections and scanning acoustic microscopy, complemented by destructive cross-sectional examination and scanning electron microscopy. The findings identified the delamination of the DBC upper copper layer, which exhibited a conchoidal fracture interface, as the primary factor that contributed to the failure of the power module with increased thermal resistance. Furthermore, the study dissected its initiation and propagation mechanisms. This investigation provides valuable insights for the development of more reliable low-inductance power module designs.</p></div>","PeriodicalId":51131,"journal":{"name":"Microelectronics Reliability","volume":"161 ","pages":"Article 115482"},"PeriodicalIF":1.6000,"publicationDate":"2024-08-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S0026271424001628/pdfft?md5=038e1075694401238843879d449ea601&pid=1-s2.0-S0026271424001628-main.pdf","citationCount":"0","resultStr":"{\"title\":\"Thermal cycling characterization of an integrated low-inductance GaN eHEMT power module\",\"authors\":\"Zhongchao Sun, Masaki Takahashi, Wendi Guo, Stig Munk-Nielsen, Asger Bjørn Jørgensen\",\"doi\":\"10.1016/j.microrel.2024.115482\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>To exploit the potential of wide-bandgap semiconductors in high-frequency applications, innovative packaging designs are developed to minimize the parasitic inductance of power modules. This study presents an integrated power module with a hybrid PCB/DBC structure, which uses top-side cooling prepackaged GaN enhancement-mode high-electron-mobility transistors. The module achieves a remarkably low parasitic inductance of 2.65 nH. However, there is relatively scarce research on the reliability of this heterostructure, particularly its sensitivity to thermomechanical stress due to the coefficients of thermal expansion mismatch among material interfaces. In this work, the thermal cycling characteristics of the integrated power module are comprehensively investigated. Electrical and thermal parameters were periodically and separately measured offline on a simplified package to monitor the health conditions and decouple possible synergy and competition effects among the failure modes from all packaging components. A thorough failure analysis was conducted using nondestructive visual inspections and scanning acoustic microscopy, complemented by destructive cross-sectional examination and scanning electron microscopy. The findings identified the delamination of the DBC upper copper layer, which exhibited a conchoidal fracture interface, as the primary factor that contributed to the failure of the power module with increased thermal resistance. Furthermore, the study dissected its initiation and propagation mechanisms. This investigation provides valuable insights for the development of more reliable low-inductance power module designs.</p></div>\",\"PeriodicalId\":51131,\"journal\":{\"name\":\"Microelectronics Reliability\",\"volume\":\"161 \",\"pages\":\"Article 115482\"},\"PeriodicalIF\":1.6000,\"publicationDate\":\"2024-08-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://www.sciencedirect.com/science/article/pii/S0026271424001628/pdfft?md5=038e1075694401238843879d449ea601&pid=1-s2.0-S0026271424001628-main.pdf\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microelectronics Reliability\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0026271424001628\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronics Reliability","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0026271424001628","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
摘要
为了挖掘宽带隙半导体在高频应用中的潜力,人们开发了创新的封装设计,以最大限度地减少功率模块的寄生电感。本研究介绍了一种采用 PCB/DBC 混合结构的集成电源模块,该模块使用顶部冷却预封装 GaN 增强型高电子迁移率晶体管。该模块实现了 2.65 nH 的超低寄生电感。然而,有关这种异质结构可靠性的研究相对较少,特别是由于材料界面之间的热膨胀系数不匹配而导致的对热机械应力的敏感性。本研究全面考察了集成电源模块的热循环特性。对简化封装上的电气和热参数进行了周期性离线单独测量,以监控健康状况,并消除所有封装元件失效模式之间可能存在的协同和竞争效应。利用无损目视检查和扫描声学显微镜,并辅以破坏性横截面检查和扫描电子显微镜,进行了全面的故障分析。研究结果表明,DBC 上铜层的分层是导致热阻增加的功率模块失效的主要因素,其断裂界面呈圆锥形。此外,研究还剖析了其引发和传播机制。这项研究为开发更可靠的低电感功率模块设计提供了宝贵的见解。
Thermal cycling characterization of an integrated low-inductance GaN eHEMT power module
To exploit the potential of wide-bandgap semiconductors in high-frequency applications, innovative packaging designs are developed to minimize the parasitic inductance of power modules. This study presents an integrated power module with a hybrid PCB/DBC structure, which uses top-side cooling prepackaged GaN enhancement-mode high-electron-mobility transistors. The module achieves a remarkably low parasitic inductance of 2.65 nH. However, there is relatively scarce research on the reliability of this heterostructure, particularly its sensitivity to thermomechanical stress due to the coefficients of thermal expansion mismatch among material interfaces. In this work, the thermal cycling characteristics of the integrated power module are comprehensively investigated. Electrical and thermal parameters were periodically and separately measured offline on a simplified package to monitor the health conditions and decouple possible synergy and competition effects among the failure modes from all packaging components. A thorough failure analysis was conducted using nondestructive visual inspections and scanning acoustic microscopy, complemented by destructive cross-sectional examination and scanning electron microscopy. The findings identified the delamination of the DBC upper copper layer, which exhibited a conchoidal fracture interface, as the primary factor that contributed to the failure of the power module with increased thermal resistance. Furthermore, the study dissected its initiation and propagation mechanisms. This investigation provides valuable insights for the development of more reliable low-inductance power module designs.
期刊介绍:
Microelectronics Reliability, is dedicated to disseminating the latest research results and related information on the reliability of microelectronic devices, circuits and systems, from materials, process and manufacturing, to design, testing and operation. The coverage of the journal includes the following topics: measurement, understanding and analysis; evaluation and prediction; modelling and simulation; methodologies and mitigation. Papers which combine reliability with other important areas of microelectronics engineering, such as design, fabrication, integration, testing, and field operation will also be welcome, and practical papers reporting case studies in the field and specific application domains are particularly encouraged.
Most accepted papers will be published as Research Papers, describing significant advances and completed work. Papers reviewing important developing topics of general interest may be accepted for publication as Review Papers. Urgent communications of a more preliminary nature and short reports on completed practical work of current interest may be considered for publication as Research Notes. All contributions are subject to peer review by leading experts in the field.