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Study on single-event burnout hardening with reduction of hole current density by top polysilicon diode of SOI LDMOS based on TCAD simulations 基于 TCAD 仿真的 SOI LDMOS 顶部多晶硅二极管降低空穴电流密度的单次烧毁硬化研究
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-17 DOI: 10.1016/j.microrel.2024.115551
Wenze Niu, Hongli Dai, Luoxin Wang, Yuming Xue, Haitao Lyu, Jinjun Guo
In this paper, a single-event burnout (SEB)-hardened design for silicon-on-insulator lateral double-diffused MOSFET (SOI LDMOS) with a top polysilicon PN-junction diode (PN-LDMOS) is presented. By analyzing the hole current density of the device at different time points after a heavy-ion event, it is found that the introduced top polysilicon diode structure can reduce the hole current flowing to the source remarkably at a certain time. Thus, the voltage drop between the emitter and base of the parasitic NPN bipolar junction transistor (BJT) inherent in the device structure is reduced, and the deep p+ structure provides a low resistance path for the holes. The combined effect of these two structures effectively suppresses the turn-on of parasitic BJT and significantly reduces the risk of SEB occurrence. Compared to the traditional LDMOS (C-LDMOS), at a LET of 0.2 pC/μm, the SEB trigger voltage (VSEB) of PN-LDMOS is improved from 129 V to 200 V, and the safe operating area (SOA) ratio (η) is increased from 58.8 % to 80 %. And the combination of polysilicon diode and field plates also optimizes the surface electric field distribution, increasing the breakdown voltage from 219.4 V to 249.7 V.
本文提出了一种具有顶部多晶硅 PN 结二极管(PN-LDMOS)的硅-绝缘体横向双扩散 MOSFET(SOI LDMOS)的单次烧毁(SEB)硬化设计。通过分析该器件在重离子事件发生后不同时间点的空穴电流密度,发现引入的顶部多晶硅二极管结构能在一定时间内显著降低流向源极的空穴电流。因此,该器件结构中固有的寄生 NPN 双极结型晶体管(BJT)发射极和基极之间的压降减小了,而深 p+ 结构则为空穴提供了一条低电阻路径。这两种结构的共同作用有效抑制了寄生 BJT 的导通,大大降低了发生 SEB 的风险。与传统的 LDMOS(C-LDMOS)相比,在 LET 为 0.2 pC/μm 时,PN-LDMOS 的 SEB 触发电压(VSEB)从 129 V 提高到 200 V,安全工作区(SOA)比(η)从 58.8 % 提高到 80 %。多晶硅二极管和场板的组合还优化了表面电场分布,将击穿电压从 219.4 V 提高到 249.7 V。
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引用次数: 0
An online junction temperature detection circuit for SiC MOSFETs considering threshold voltage drift compensation 考虑阈值电压漂移补偿的 SiC MOSFET 在线结温检测电路
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-17 DOI: 10.1016/j.microrel.2024.115548
Ruoyin Wang , Xiaoyong Zhu
Temperature is the main factor affecting the reliability of SiC MOSFETs. Therefore, real-time monitoring technology for junction temperature has become a prerequisite for implementing thermal management strategies. Based on the temperature sensitive electrical parameter method, this paper first determines the temperature dependence of the threshold voltage Vth. Secondly, a SiC MOSFETs junction temperature detection circuit based on threshold voltage is constructed using a T flip-flop. Furthermore, based on this circuit, the junction temperature detection of SiC MOSFETs is achieved. This method has a simple circuit structure, does not require intrusion into the device interior, and can be measured online. Then, an inverter experimental platform is built, and the junction temperature detection performance of the proposed method is tested both offline and online. The experimental results showed that the proposed method has good sensitivity and linearity(-5 mV/°C), and the error is less than 3 °C. Finally, this paper further proposes a threshold voltage drift compensation strategy flow for the junction temperature model to correct the detection error caused by aging.
温度是影响 SiC MOSFET 可靠性的主要因素。因此,结温实时监控技术已成为实施热管理策略的先决条件。本文基于温度敏感电参数方法,首先确定了阈值电压 Vth 的温度依赖性。其次,利用 T 触发器构建了基于阈值电压的 SiC MOSFET 结温检测电路。此外,基于该电路,还实现了 SiC MOSFET 的结温检测。该方法电路结构简单,无需侵入器件内部,可在线测量。然后,建立了一个逆变器实验平台,并对所提方法的结温检测性能进行了离线和在线测试。实验结果表明,所提出的方法具有良好的灵敏度和线性度(-5 mV/°C),误差小于 3 °C。最后,本文进一步提出了结温模型的阈值电压漂移补偿策略流程,以纠正老化引起的检测误差。
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引用次数: 0
Thermal cycling reliability of electronic components in bolted assemblies: A study of the influence of bolt position 螺栓组件中电子元件的热循环可靠性:螺栓位置影响研究
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-16 DOI: 10.1016/j.microrel.2024.115549
Shuaifeng Zhao , Weiqi Guo , Shaobin Wang , Weiwei Zhang , Xin Li
This paper aims to investigate the influence of bolt assembly position on the fatigue life characteristics of electronic components under thermal cycling loads. In this study, the parameters of the Unified Creep Plasticity (UCP) constitutive model for 63Sn37Pb solder were determined, along with the actual coefficients of thermal expansion (CTE) for each component within the electronic assembly. A high-precision finite element model (FEM) was developed and validated through temperature cycling tests on printed circuit board (PCB) assemblies. The error between the fatigue life of solder joints obtained from the temperature cycling tests and the FEM simulation was within 1 %. Finally, a thermal cycling simulation analysis was conducted on the PCB assembly under different bolt assembly positions. The simulation results revealed a correlation between the bolt assembly locations and the fatigue life of solder joints. The findings of this study can serve as a reference for future efforts aimed at improving the reliability of solder joints under various assembly conditions.
本文旨在研究螺栓装配位置对热循环负载下电子元件疲劳寿命特性的影响。在这项研究中,确定了 63Sn37Pb 焊料的统一蠕变塑性(UCP)构成模型参数,以及电子组件中每个元件的实际热膨胀系数(CTE)。开发了一个高精度有限元模型(FEM),并通过对印刷电路板(PCB)组件的温度循环测试进行了验证。温度循环测试得出的焊点疲劳寿命与有限元模型模拟之间的误差在 1%以内。最后,对不同螺栓装配位置下的印刷电路板组件进行了热循环模拟分析。模拟结果显示,螺栓装配位置与焊点疲劳寿命之间存在相关性。这项研究的结果可为今后旨在提高各种装配条件下焊点可靠性的工作提供参考。
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引用次数: 0
Research on equivalent modeling and model testing verification methods for material mechanics parameters of TXV structure TXV 结构材料力学参数的等效建模和模型试验验证方法研究
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-14 DOI: 10.1016/j.microrel.2024.115545
Tingwei Gu, Ning Liu, Zhengsen Feng, Xiaodong Sun, Xiangdong Meng
Aiming at the problems of multi-scale mesh division and low computational efficiency encountered during TXV (through X via) structural simulation, an equivalent modeling method for material mechanics parameters of TXV structure is proposed. By conducting mechanics simulations on the minimum elements of three TXV structures, namely through silicon via (TSV), through mold via (TMV) and through glass via (TGV), the anisotropic material mechanics parameters of TXV structures corresponding to different substrate materials, via diameters, via depths and via pitches are obtained. Based on simulation data and BP (back propagation) neural network algorithm, the material mechanics parameter equivalence models of TXV structures are established. Based on the four-point bending method, the theoretical calculation and simulation analysis of the actual TSV structure are carried out, and the accuracy of the equivalent model is tested and verified by the force and strain measurement systems. The simulation and test results show that the prediction accuracy of equivalent models based on BP algorithm is high, and the prediction errors for training samples of TSV, TMV and TGV structures are less than 0.467 %, 3.571 % and 1.303 %, respectively, and the prediction errors for testing samples are less than 0.424 %, 3.130 % and 1.444 %, respectively. After equivalence and simplification, the mesh division and computational efficiency of the simulation model are improved significantly, the number of mesh elements is reduced by 95.79 %, and the calculation time is shortened by 94.17 %. The simulation accuracy based on the equivalent model is high, the strain simulation error between the simplified model and the complete model is 0.24 %, and the error between the strain simulation result of the simplified model and the actual measurement result is 2.81 %.
针对 TXV(穿 X 通路)结构模拟过程中遇到的多尺度网格划分和计算效率低等问题,提出了 TXV 结构材料力学参数的等效建模方法。通过对硅通孔 (TSV)、模通孔 (TMV) 和玻璃通孔 (TGV) 三种 TXV 结构的最小元素进行力学模拟,得到了 TXV 结构在不同基底材料、通孔直径、通孔深度和通孔间距下的各向异性材料力学参数。基于仿真数据和 BP(反向传播)神经网络算法,建立了 TXV 结构的材料力学参数等效模型。基于四点弯曲法,对实际 TSV 结构进行了理论计算和仿真分析,并通过力和应变测量系统测试和验证了等效模型的准确性。仿真和测试结果表明,基于 BP 算法的等效模型预测精度较高,TSV、TMV 和 TGV 结构训练样本的预测误差分别小于 0.467 %、3.571 % 和 1.303 %,测试样本的预测误差分别小于 0.424 %、3.130 % 和 1.444 %。经过等效和简化后,仿真模型的网格划分和计算效率显著提高,网格元素数量减少了 95.79 %,计算时间缩短了 94.17 %。基于等效模型的仿真精度高,简化模型与完整模型的应变仿真误差为 0.24 %,简化模型的应变仿真结果与实际测量结果的误差为 2.81 %。
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引用次数: 0
The impact of negative gate voltage on neutron-induced single event effects for SiC MOSFETs 负栅极电压对 SiC MOSFET 中子诱发的单事件效应的影响
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-14 DOI: 10.1016/j.microrel.2024.115547
Haibin Wang , Zhichao Nie , Xiaofeng Huang , Jianghao Gu , Zhixin Tan , Hantao Jing , Lihua Mo , Zhiliang Hu , Xueming Wang
Atmospheric neutrons can cause failures in SiC power devices, especially in critical components such as SiC MOSFETs. SiC MOSFETs typically employ a negative gate bias in the off-state to prevent unnecessary false turn-on. However, this gate voltage in the off-state can influence the sensitivity to single-event effects (SEEs). In this paper, the impact of negative gate voltage on neutron-induced SEEs in SiC MOSFETs is investigated and analyzed. A high-precision irradiation test system is designed, upon which neutron irradiation experiments have been conducted at various drain-source voltages, each corresponding to two different gate-source voltages. The experimental results demonstrate that negative gate voltage increases the failure rate of SEEs. Based on Sentaurus TCAD, a 2D TCAD model of SiC MOSFET has been established for simulation, and the dependence of single-event gate rupture (SEGR) on negative gate voltage is analyzed, as well as its impact mechanism on single-event burnout (SEB).
大气中的中子会导致碳化硅功率器件发生故障,尤其是碳化硅 MOSFET 等关键元件。SiC MOSFET 通常在关断状态采用负栅极偏置,以防止不必要的误导通。然而,这种关断状态下的栅极电压会影响对单次事件效应(SEE)的灵敏度。本文研究和分析了负栅极电压对 SiC MOSFET 中子诱发 SEE 的影响。设计了一个高精度辐照测试系统,并在该系统上进行了不同漏极-源极电压下的中子辐照实验,每个漏极-源极电压对应两个不同的栅极-源极电压。实验结果表明,负栅极电压会增加 SEE 的失效率。基于 Sentaurus TCAD,建立了 SiC MOSFET 的二维 TCAD 模型进行仿真,分析了单事件栅极破裂(SEGR)与负栅极电压的关系,以及其对单事件烧毁(SEB)的影响机制。
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引用次数: 0
Reliability optimization of dopant-free TFET performance through advanced metal layer techniques 通过先进的金属层技术优化无掺杂 TFET 性能的可靠性
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-12 DOI: 10.1016/j.microrel.2024.115542
Bandi Venkata Chandan, Madhura Prashant Bakshi, Kaushal Kumar Nigam
To address the low ON-current and reliability issues of dopant-free TFETs, we have incorporated a metal-layer near the source/channel (S/C) interface. The use of this metal layer facilitates a larger flow of electrons near the junction, which helps the ON-current (ION) exceed 10−4 A/μm under lower biasing conditions. This enhancement in ION improves various performance metrics in analog, RF, and linearity applications. Furthermore to assess dependability, we analyzed the impact of acceptor and donor charges on the DL-MS-TFET, focusing on trap effects near interface (ITCs). The results reveal that the presence of these trap charges significantly affects the flat-band voltage, leading to reduced variations in the performance of DL-MS-TFETs. Furthermore, we observed the influence of the metal strip work function on DC performance characteristics. A noticeable decrease in ON-current was found as the metal layer work function increased. Overall, the MS-dopant-free TFET demonstrates superior performance in the presence of ITCs, making it suitable for low-voltage and analog-RF applications.
为了解决无掺杂 TFET 的低导通电流和可靠性问题,我们在源极/沟道(S/C)界面附近加入了一层金属层。这种金属层的使用有利于在结点附近产生更大的电子流,从而帮助导通电流(ION)在较低的偏置条件下超过 10-4 A/μm 。ION 的增强改善了模拟、射频和线性应用中的各种性能指标。此外,为了评估可靠性,我们分析了受体和供体电荷对 DL-MS-TFET 的影响,重点是界面附近的陷阱效应(ITC)。结果表明,这些陷阱电荷的存在会显著影响平带电压,导致 DL-MS-TFET 的性能变化减小。此外,我们还观察了金属带功函数对直流性能特性的影响。随着金属层功函数的增加,导通电流明显下降。总之,无掺杂 MS 的 TFET 在存在 ITC 的情况下表现出卓越的性能,使其适用于低电压和模拟射频应用。
{"title":"Reliability optimization of dopant-free TFET performance through advanced metal layer techniques","authors":"Bandi Venkata Chandan,&nbsp;Madhura Prashant Bakshi,&nbsp;Kaushal Kumar Nigam","doi":"10.1016/j.microrel.2024.115542","DOIUrl":"10.1016/j.microrel.2024.115542","url":null,"abstract":"<div><div>To address the low ON-current and reliability issues of dopant-free TFETs, we have incorporated a metal-layer near the source/channel (S/C) interface. The use of this metal layer facilitates a larger flow of electrons near the junction, which helps the ON-current (<span><math><msub><mrow><mi>I</mi></mrow><mrow><mi>O</mi><mi>N</mi></mrow></msub></math></span>) exceed 10<sup>−4</sup> A/<span><math><mrow><mi>μ</mi><mi>m</mi></mrow></math></span> under lower biasing conditions. This enhancement in <span><math><msub><mrow><mi>I</mi></mrow><mrow><mi>O</mi><mi>N</mi></mrow></msub></math></span> improves various performance metrics in analog, RF, and linearity applications. Furthermore to assess dependability, we analyzed the impact of acceptor and donor charges on the DL-MS-TFET, focusing on trap effects near interface (ITCs). The results reveal that the presence of these trap charges significantly affects the flat-band voltage, leading to reduced variations in the performance of DL-MS-TFETs. Furthermore, we observed the influence of the metal strip work function on DC performance characteristics. A noticeable decrease in ON-current was found as the metal layer work function increased. Overall, the MS-dopant-free TFET demonstrates superior performance in the presence of ITCs, making it suitable for low-voltage and analog-RF applications.</div></div>","PeriodicalId":51131,"journal":{"name":"Microelectronics Reliability","volume":"163 ","pages":"Article 115542"},"PeriodicalIF":1.6,"publicationDate":"2024-11-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142657147","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The effect of oxide scaling on ionising radiation response of sense-switch flash cells 氧化物缩放对感应开关闪存电池电离辐射响应的影响
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-11 DOI: 10.1016/j.microrel.2024.115546
Hui Shi, Yinquan Wang, Lichao Cao, Genshen Hong, Ruocheng Zheng, Hejun Xu, Yi Wang, Rubin Xie
The effect of tunnel oxide and Oxide/Nitride/Oxide (ONO) thinning on the total ionising dose (TID) response of Sense-Switch flash cells is investigated by gamma-ray radiation. The threshold voltage shift of the programmed-state cell is reduced, while the threshold voltage shift of the erased-state cell is increased when oxide thickness is scaled down. A new physical model is developed to express the oxide thickness dependence on threshold voltage shift. The radiation mechanisms dominating the TID response are determined by model fitting and parameter extraction. For the programmed-state flash cell, the hole trapping and injection rates are reduced as the oxide thickness decreases, which leads to a smaller threshold voltage shift. However, the increased hole emission rate for the erased flash cell is responsible for the more significant threshold voltage shift.
通过伽马射线辐射研究了隧道氧化物和氧化物/氮化物/氧化物(ONO)减薄对感应开关闪存电池总电离剂量(TID)响应的影响。当氧化物厚度减薄时,编程态电池的阈值电压偏移减小,而擦除态电池的阈值电压偏移增大。我们建立了一个新的物理模型来表达氧化层厚度对阈值电压偏移的影响。通过模型拟合和参数提取,确定了主导 TID 响应的辐射机制。对于编程态闪存电池,空穴捕获率和注入率随着氧化物厚度的减小而降低,从而导致阈值电压偏移变小。然而,擦除闪存电池的空穴发射率增加,导致了更显著的阈值电压偏移。
{"title":"The effect of oxide scaling on ionising radiation response of sense-switch flash cells","authors":"Hui Shi,&nbsp;Yinquan Wang,&nbsp;Lichao Cao,&nbsp;Genshen Hong,&nbsp;Ruocheng Zheng,&nbsp;Hejun Xu,&nbsp;Yi Wang,&nbsp;Rubin Xie","doi":"10.1016/j.microrel.2024.115546","DOIUrl":"10.1016/j.microrel.2024.115546","url":null,"abstract":"<div><div>The effect of tunnel oxide and Oxide/Nitride/Oxide (ONO) thinning on the total ionising dose (TID) response of Sense-Switch flash cells is investigated by gamma-ray radiation. The threshold voltage shift of the programmed-state cell is reduced, while the threshold voltage shift of the erased-state cell is increased when oxide thickness is scaled down. A new physical model is developed to express the oxide thickness dependence on threshold voltage shift. The radiation mechanisms dominating the TID response are determined by model fitting and parameter extraction. For the programmed-state flash cell, the hole trapping and injection rates are reduced as the oxide thickness decreases, which leads to a smaller threshold voltage shift. However, the increased hole emission rate for the erased flash cell is responsible for the more significant threshold voltage shift.</div></div>","PeriodicalId":51131,"journal":{"name":"Microelectronics Reliability","volume":"163 ","pages":"Article 115546"},"PeriodicalIF":1.6,"publicationDate":"2024-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142657146","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Experimental analysis of NBTI effects on QDI circuits with resistive bridging faults 具有电阻桥接故障的 QDI 电路的 NBTI 效应实验分析
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-08 DOI: 10.1016/j.microrel.2024.115544
Zina Lamine , Ghania Ait Abdelmalek , Rezki Ziani , Rabah Mokdad
Detecting defects in Delay-Insensitive Circuits (DIC), particularly for clockless asynchronous circuits, poses a major challenge. Traditional testing methods are complex and result in significant overhead. The robustness of asynchronous circuits is crucial for ensuring the safety and reliability of critical systems, as undetected defects can compromise their operation. To address these challenges, our method leverages the unique voltage signatures of asynchronous circuits to identify resistive defects. Through our FPGA experiments, we demonstrated the circuits' ability to generate informative voltage signatures, thereby facilitating the detection of these defects. Additionally, we performed a combined analysis of resistive defect detection and the impact of aging caused by Negative-Bias Temperature Instability (NBTI) on Quasi Delay Insensitive (QDI) circuits. This analysis highlights how defects can evade manufacturing tests and evolve into dynamic faults over time. Our results provide a precise evaluation of this impact and propose a comprehensive approach to assess circuit robustness under realistic operating conditions.
检测延迟不敏感电路(DIC)中的缺陷,尤其是无时钟异步电路中的缺陷,是一项重大挑战。传统的测试方法非常复杂,而且开销巨大。异步电路的稳健性对于确保关键系统的安全性和可靠性至关重要,因为未检测到的缺陷可能会危及系统的运行。为了应对这些挑战,我们的方法利用异步电路独特的电压特征来识别电阻缺陷。通过 FPGA 实验,我们证明了电路生成信息电压特征的能力,从而促进了这些缺陷的检测。此外,我们还对电阻缺陷检测和负偏压温度不稳定性(NBTI)引起的老化对准延迟不敏感(QDI)电路的影响进行了综合分析。这项分析强调了缺陷如何逃避制造测试,并随着时间的推移演变成动态故障。我们的结果提供了对这种影响的精确评估,并提出了一种在现实操作条件下评估电路鲁棒性的综合方法。
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引用次数: 0
Signal integrity and heat transfer performance of through-boron nitride via 氮化硼通孔的信号完整性和传热性能
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-05 DOI: 10.1016/j.microrel.2024.115531
Chao Sun , Chunmin Cheng , Zhaofu Zhang , Gai Wu , Hutao Shi , Zhenyang Lei , Lijie Li , Kang Liang , Wei Shen , Sheng Liu
Silicon interposer is widely used in 2.5D integrated packages due to its good dielectric properties and mature process. However, silicon interposer is not suitable for high-power devices and radio frequency devices, suffering from poor signal integrity and low thermal conduction efficiency. In this work, c-BN is used as an interposer to provide a solution for electrical signal interference and thermal aggregation in the devices. In addition, PTFE, glass and h-BN, w-BN have also been studied for comparison. The finite element simulation results show that the return loss of the TBV (c) is 3.3 dB lower than that of the TSV at 40 GHz. The insertion loss of TBV (c) is 0.12 dB higher than that of TSV. The c-BN interposer performs better than the silicon interposer in terms of signal integrity, with a similar performance to the glass interposer. The accuracy of the finite element simulation is verified by the RLGC analytical model. The return loss of TBV (c) decreases due to the decrease in the interposer thickness, the increase in spacing between the Cu pillars or the increase in radius of the Cu pillars. Owing to the high thermal conductivity of c-BN, the horizontal and the vertical equivalent thermal conductivity of TBV (c) are approximately 8 times than those of TSV. The heat dissipation performance of TBV (c) is also better than that of TSV. The TBV (c) interposer shows advantages in both electrical and heat transfer aspects, which provide new perspectives for device development in 2.5D integrated packages.
硅插层因其良好的介电性能和成熟的工艺,被广泛应用于 2.5D 集成封装。然而,硅插层并不适用于大功率器件和射频器件,存在信号完整性差和热传导效率低的问题。在这项工作中,c-BN 被用作中间膜,为器件的电信号干扰和热聚集提供了解决方案。此外,还对聚四氟乙烯、玻璃和 h-BN、w-BN 进行了比较研究。有限元模拟结果表明,在 40 GHz 时,TBV (c) 的回波损耗比 TSV 低 3.3 dB。TBV (c) 的插入损耗比 TSV 高 0.12 dB。在信号完整性方面,c-BN 内插件的性能优于硅内插件,与玻璃内插件的性能相似。RLGC 分析模型验证了有限元仿真的准确性。TBV (c) 的回波损耗会因插层厚度减小、铜柱间距增大或铜柱半径增大而减小。由于 c-BN 具有高热导率,TBV(c)的水平和垂直等效热导率约为 TSV 的 8 倍。TBV (c) 的散热性能也优于 TSV。TBV (c) 夹层在电气和热传导方面都具有优势,这为 2.5D 集成封装中的器件开发提供了新的前景。
{"title":"Signal integrity and heat transfer performance of through-boron nitride via","authors":"Chao Sun ,&nbsp;Chunmin Cheng ,&nbsp;Zhaofu Zhang ,&nbsp;Gai Wu ,&nbsp;Hutao Shi ,&nbsp;Zhenyang Lei ,&nbsp;Lijie Li ,&nbsp;Kang Liang ,&nbsp;Wei Shen ,&nbsp;Sheng Liu","doi":"10.1016/j.microrel.2024.115531","DOIUrl":"10.1016/j.microrel.2024.115531","url":null,"abstract":"<div><div>Silicon interposer is widely used in 2.5D integrated packages due to its good dielectric properties and mature process. However, silicon interposer is not suitable for high-power devices and radio frequency devices, suffering from poor signal integrity and low thermal conduction efficiency. In this work, c-BN is used as an interposer to provide a solution for electrical signal interference and thermal aggregation in the devices. In addition, PTFE, glass and h-BN, w-BN have also been studied for comparison. The finite element simulation results show that the return loss of the TBV (c) is 3.3 dB lower than that of the TSV at 40 GHz. The insertion loss of TBV (c) is 0.12 dB higher than that of TSV. The c-BN interposer performs better than the silicon interposer in terms of signal integrity, with a similar performance to the glass interposer. The accuracy of the finite element simulation is verified by the RLGC analytical model. The return loss of TBV (c) decreases due to the decrease in the interposer thickness, the increase in spacing between the Cu pillars or the increase in radius of the Cu pillars. Owing to the high thermal conductivity of c-BN, the horizontal and the vertical equivalent thermal conductivity of TBV (c) are approximately 8 times than those of TSV. The heat dissipation performance of TBV (c) is also better than that of TSV. The TBV (c) interposer shows advantages in both electrical and heat transfer aspects, which provide new perspectives for device development in 2.5D integrated packages.</div></div>","PeriodicalId":51131,"journal":{"name":"Microelectronics Reliability","volume":"163 ","pages":"Article 115531"},"PeriodicalIF":1.6,"publicationDate":"2024-11-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142587129","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Modeling of HCI effect in nFinFET for circuit reliability simulation 用于电路可靠性模拟的 nFinFET 中 HCI 效应建模
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-11-05 DOI: 10.1016/j.microrel.2024.115543
Jun-an Zhang, Bo Liu, Hao Chen, Chao Li, Dan Li, Tiehu Li, Yunhua Lu, Qingwei Zhang
This paper proposes an equivalent circuit model for simulating the Hot Carrier Injection (HCI) effect. This model is developed based on the N-FinFET in the 12 nm Process Design Kit (PDK) and incorporates arithmetic units and electrical components from the Electronic Design Automatic (EDA) software. Input parameters can be freely modified by the user, such as stress time, ambient temperature, gate length, gate width and process corner. The model also considers the influence of the voltage at each end of the transistor on the HCI effect. The model can be accessed in the EDA tool just like a normal transistor and can be used to evaluate the HCI effect on circuits without modifying the SPICE model. The accuracy and applicability of this model has been verified by comparing it with measured results from other published literature.
本文提出了一种模拟热载流子注入 (HCI) 效应的等效电路模型。该模型基于 12 纳米工艺设计套件 (PDK) 中的 N-FinFET 开发,并结合了电子设计自动化 (EDA) 软件中的运算单元和电气元件。输入参数可由用户自由修改,如应力时间、环境温度、栅极长度、栅极宽度和工艺转角。该模型还考虑了晶体管两端的电压对 HCI 效应的影响。在 EDA 工具中可以像访问普通晶体管一样访问该模型,并可用于评估电路的 HCI 效应,而无需修改 SPICE 模型。该模型的准确性和适用性已通过与其他已发表文献中的测量结果进行比较得到验证。
{"title":"Modeling of HCI effect in nFinFET for circuit reliability simulation","authors":"Jun-an Zhang,&nbsp;Bo Liu,&nbsp;Hao Chen,&nbsp;Chao Li,&nbsp;Dan Li,&nbsp;Tiehu Li,&nbsp;Yunhua Lu,&nbsp;Qingwei Zhang","doi":"10.1016/j.microrel.2024.115543","DOIUrl":"10.1016/j.microrel.2024.115543","url":null,"abstract":"<div><div>This paper proposes an equivalent circuit model for simulating the Hot Carrier Injection (HCI) effect. This model is developed based on the N-FinFET in the 12 nm Process Design Kit (PDK) and incorporates arithmetic units and electrical components from the Electronic Design Automatic (EDA) software. Input parameters can be freely modified by the user, such as stress time, ambient temperature, gate length, gate width and process corner. The model also considers the influence of the voltage at each end of the transistor on the HCI effect. The model can be accessed in the EDA tool just like a normal transistor and can be used to evaluate the HCI effect on circuits without modifying the SPICE model. The accuracy and applicability of this model has been verified by comparing it with measured results from other published literature.</div></div>","PeriodicalId":51131,"journal":{"name":"Microelectronics Reliability","volume":"163 ","pages":"Article 115543"},"PeriodicalIF":1.6,"publicationDate":"2024-11-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142587128","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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Microelectronics Reliability
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