通过等离子体增强化学气相沉积法合成石墨烯的电沉积铜箔的可行性和结构转变:对高频应用的影响

IF 4.3 3区 材料科学 Q2 CHEMISTRY, MULTIDISCIPLINARY Advanced Materials Interfaces Pub Date : 2024-08-19 DOI:10.1002/admi.202400016
Chen-Hsuan Lu, Kuang-Ming Shang, Shi-Ri Lee, Jheng-Ying Li, Patricia T.C. Lee, Chyi-Ming Leu, Yu-Chong Tai, Nai-Chang Yeh
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摘要

大面积石墨烯通常是在轧制退火铜箔上合成的,需要转移到其他基底上才能应用。本研究探讨了通过等离子体增强化学气相沉积(PECVD)在电沉积(ED)铜箔(用于锂离子电池和印刷电路板)上大面积生长石墨烯。研究表明,在设定的等离子体功率下,最短的生长时间就能确保石墨烯的全面覆盖,从而形成单层石墨烯,然后再形成多层石墨烯,这表明等离子体增强化学气相沉积技术在电解铜上的生长不受自身限制。该工艺还对电解铜基底进行了有益的改性,如去除表面锌层,改变铜晶粒大小和取向,从而改善石墨烯的生长。此外,该研究还包括共面波导(CPW)系统中的高频散射参数(S 参数)测量。这涉及蓝宝石衬底上的石墨烯和银电极。S 参数数据表明,与不使用石墨烯的共面波导相比,使用石墨烯的共面波导在高频电路中的插入损耗有所降低。这强调了石墨烯在减少高频环境中金属层和介电层之间插入损耗方面的作用,为工业和技术应用提供了宝贵的启示。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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Feasibility and Structural Transformation of Electrodeposited Copper Foils for Graphene Synthesis by Plasma-Enhanced Chemical Vapor Deposition: Implications for High-Frequency Applications

Large-area graphene is typically synthesized on rolled-annealed copper foils, which require transferring to other substrates for applications. This study examines large-area graphene growth on electrodeposited (ED) copper foils—used in lithium-ion batteries and printed circuit boards—via plasma-enhanced chemical vapor deposition (PECVD). It reveals that, for a set plasma power, a minimum growth time ensures full graphene coverage, leading to monolayer and then multilayer graphene, showing PECVD growth on ED copper is not self-limited. The process also beneficially modifies the ED copper substrate, like removing the surface zinc layer and changing copper grain size and orientation, thus improving graphene growth. Additionally, the study includes high-frequency scattering parameter (S-parameter) measurements in a coplanar waveguide (CPW) system. This involves graphene on a sapphire substrate with a silver electrode. The S-parameter data indicate that the CPW with graphene shows reduced insertion losses in high-frequency circuits compared to those without graphene. This underscores graphene's role in reducing insertion losses between metallic and dielectric layers in high-frequency settings, offering valuable insights for industrial and technological applications.

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来源期刊
Advanced Materials Interfaces
Advanced Materials Interfaces CHEMISTRY, MULTIDISCIPLINARY-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
8.40
自引率
5.60%
发文量
1174
审稿时长
1.3 months
期刊介绍: Advanced Materials Interfaces publishes top-level research on interface technologies and effects. Considering any interface formed between solids, liquids, and gases, the journal ensures an interdisciplinary blend of physics, chemistry, materials science, and life sciences. Advanced Materials Interfaces was launched in 2014 and received an Impact Factor of 4.834 in 2018. The scope of Advanced Materials Interfaces is dedicated to interfaces and surfaces that play an essential role in virtually all materials and devices. Physics, chemistry, materials science and life sciences blend to encourage new, cross-pollinating ideas, which will drive forward our understanding of the processes at the interface. Advanced Materials Interfaces covers all topics in interface-related research: Oil / water separation, Applications of nanostructured materials, 2D materials and heterostructures, Surfaces and interfaces in organic electronic devices, Catalysis and membranes, Self-assembly and nanopatterned surfaces, Composite and coating materials, Biointerfaces for technical and medical applications. Advanced Materials Interfaces provides a forum for topics on surface and interface science with a wide choice of formats: Reviews, Full Papers, and Communications, as well as Progress Reports and Research News.
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