基于 XPS 和 REELS 的互补性原位测定砷化镓(1 1 1)A 上 InxGa1-x 纳米微滴中的铟/镓成分

IF 6.3 2区 材料科学 Q2 CHEMISTRY, PHYSICAL Applied Surface Science Pub Date : 2024-09-14 DOI:10.1016/j.apsusc.2024.161218
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引用次数: 0

摘要

这项工作提供了一种基于 X 射线光电子能谱(XPS)和反射电子能量损失能谱(REELS)互补性的新工具。更确切地说,这项研究的重点是在液滴外延法生长 III-V 量子点的第一阶段,现场精确测定 GaAs(1 1 1)A 衬底上自组装 InxGa1-x 纳米液滴中的铟和镓成分。基于 In4d 和 Ga3d 核水平的 XPS 强度模型可以在假定液滴均匀的情况下估算出液滴内的镓/铟比值。另一方面,我们开发了一种全新的分解方法,用于分解从沉积在基底上的液滴的 REELS 光谱中获得的损耗概率曲线。通过实验获得的 InxGa1-x 体等离子体能量和半经验建模,可以从 REELS 计算出液滴中的铟镓成分。通过比较 XPS 和 REELS 得出的这些值,可以获得有关 In/Ga 混合的信息,从而生长出二元 InxGa1-x 纳米液滴。它们之间的良好一致性表明,通过液滴外延生长 InxGa1-xN 量子点,在很大的成分范围内都能取得很好的结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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In situ determination of indium/gallium composition in InxGa1-x nanodroplets on GaAs(1 1 1)A based on the complementarity between XPS and REELS

This work provides a new tool based on the complementarity between X-ray Photoelectron Spectroscopy (XPS) and Reflection Electron Energy Loss Spectroscopy (REELS). More precisely, this study is focused on the in situ precise determination of indium and gallium composition of self-assembled InxGa1-x nanodroplets on GaAs(1 1 1)A substrate during the first stage of III-V quantum dots growth by droplet epitaxy. An XPS intensity model based on In4d and Ga3d core levels enables the estimation of the gallium/indium ratio within the droplets under the assumption of a homogeneous droplet. On the other hand, we develop a brand new decomposition methodology of loss probabilities curves obtained from REELS spectra for droplets deposited on a substrate. The energy of InxGa1-x bulk plasmon experimentally obtained and semi-empirically modelled allows to calculate from REELS the indium-gallium composition in the droplet. Comparison between these values obtained by both XPS and REELS provides information about In/Ga mixing to grow binary InxGa1-x nanodroplets. Their good agreement shows promising results for the growth of InxGa1-xN quantum dots by droplet epitaxy for a very large range of composition.

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来源期刊
Applied Surface Science
Applied Surface Science 工程技术-材料科学:膜
CiteScore
12.50
自引率
7.50%
发文量
3393
审稿时长
67 days
期刊介绍: Applied Surface Science covers topics contributing to a better understanding of surfaces, interfaces, nanostructures and their applications. The journal is concerned with scientific research on the atomic and molecular level of material properties determined with specific surface analytical techniques and/or computational methods, as well as the processing of such structures.
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