{"title":"用于气体传感应用的不同形状 TFET 结构对 SiGe 袋的影响","authors":"Yeroosan Getachew Hirphaa, Avtar Singh, Tadesse Hailu, Chaliti Fikadu Wakweya","doi":"10.1016/j.micrna.2024.207998","DOIUrl":null,"url":null,"abstract":"<div><div>Gas sensing requires highly sensitive and selective sensor technologies for environmental monitoring, industrial safety, and public health objectives. Although conventional MOSFET-based gas sensors are widely utilized, their detection of low quantities of gases, such as ammonia, is hindered by a number of severe constraints. TFET is emerged as the better device than MOSFET, particularly for the sensing applications. In this work we discussed the source engineered and shape engineered techniques to improve the performance of TFETs, specifically for ammonia gas detection. Comprehensive simulations on SILVACO TCAD and compared the four TFET structures SiGe-pocket DGTFET, SiGe-pocket vertical TFET SiGe-pocket Z-shape TFET, and SiGe-pocket U-shape TFET structure on the basis of various electrical characterization parameters. Significant improvements in efficiency and sensitivity are obtained by adjusting the work function of the molybdenum (4.40–4.60 eV) catalytic gate metal to find the optimal values. The findings reveal that the SiGe-pocket U-shape TFET structure exhibits superior performance, demonstrating an I<sub>ON</sub> of 8.01 × 10<sup>−4</sup> A/μm, an I<sub>ON</sub>/I<sub>OFF</sub> ratio of 1.25×10<sup>13</sup>, and an OFF current sensitivity (S<sub>OFF</sub>) of 1.262. These results highlight the enhanced sensitivity and efficacy of the proposed SiGe-pocket U-shape tunnel FET in ammonia gas sensing applications, making it a promising candidate for practical uses in environmental monitoring and industrial safety.</div></div>","PeriodicalId":100923,"journal":{"name":"Micro and Nanostructures","volume":"196 ","pages":"Article 207998"},"PeriodicalIF":2.7000,"publicationDate":"2024-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Impact of SiGe pocket on different shape TFET structures for gas sensing application\",\"authors\":\"Yeroosan Getachew Hirphaa, Avtar Singh, Tadesse Hailu, Chaliti Fikadu Wakweya\",\"doi\":\"10.1016/j.micrna.2024.207998\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Gas sensing requires highly sensitive and selective sensor technologies for environmental monitoring, industrial safety, and public health objectives. Although conventional MOSFET-based gas sensors are widely utilized, their detection of low quantities of gases, such as ammonia, is hindered by a number of severe constraints. TFET is emerged as the better device than MOSFET, particularly for the sensing applications. In this work we discussed the source engineered and shape engineered techniques to improve the performance of TFETs, specifically for ammonia gas detection. Comprehensive simulations on SILVACO TCAD and compared the four TFET structures SiGe-pocket DGTFET, SiGe-pocket vertical TFET SiGe-pocket Z-shape TFET, and SiGe-pocket U-shape TFET structure on the basis of various electrical characterization parameters. Significant improvements in efficiency and sensitivity are obtained by adjusting the work function of the molybdenum (4.40–4.60 eV) catalytic gate metal to find the optimal values. The findings reveal that the SiGe-pocket U-shape TFET structure exhibits superior performance, demonstrating an I<sub>ON</sub> of 8.01 × 10<sup>−4</sup> A/μm, an I<sub>ON</sub>/I<sub>OFF</sub> ratio of 1.25×10<sup>13</sup>, and an OFF current sensitivity (S<sub>OFF</sub>) of 1.262. These results highlight the enhanced sensitivity and efficacy of the proposed SiGe-pocket U-shape tunnel FET in ammonia gas sensing applications, making it a promising candidate for practical uses in environmental monitoring and industrial safety.</div></div>\",\"PeriodicalId\":100923,\"journal\":{\"name\":\"Micro and Nanostructures\",\"volume\":\"196 \",\"pages\":\"Article 207998\"},\"PeriodicalIF\":2.7000,\"publicationDate\":\"2024-10-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Micro and Nanostructures\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S2773012324002474\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micro and Nanostructures","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S2773012324002474","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
引用次数: 0
摘要
气体传感需要高灵敏度和高选择性的传感器技术,以实现环境监测、工业安全和公共卫生目标。虽然基于 MOSFET 的传统气体传感器得到了广泛应用,但它们对氨等低量气体的检测受到了许多严重限制。与 MOSFET 相比,TFET 是一种更好的器件,尤其适用于传感应用。在这项工作中,我们讨论了改善 TFET 性能的源工程和形状工程技术,特别是在氨气检测方面。我们在 SILVACO TCAD 上进行了全面模拟,并根据各种电气特性参数比较了四种 TFET 结构:SiGe-pocket DGTFET、SiGe-pocket 垂直 TFET、SiGe-pocket Z 形 TFET 和 SiGe-pocket U 形 TFET 结构。通过调整钼(4.40-4.60 eV)催化栅金属的功函数,找到最佳值,从而显著提高了效率和灵敏度。研究结果表明,SiGe-pocket U 形 TFET 结构具有卓越的性能,其离子强度为 8.01 × 10-4 A/μm,离子强度/离子强度比为 1.25×1013,关断电流灵敏度(SOFF)为 1.262。这些结果凸显了所提出的 SiGe-pocket U 形隧道场效应晶体管在氨气传感应用中的灵敏度和功效,使其有望在环境监测和工业安全领域得到实际应用。
Impact of SiGe pocket on different shape TFET structures for gas sensing application
Gas sensing requires highly sensitive and selective sensor technologies for environmental monitoring, industrial safety, and public health objectives. Although conventional MOSFET-based gas sensors are widely utilized, their detection of low quantities of gases, such as ammonia, is hindered by a number of severe constraints. TFET is emerged as the better device than MOSFET, particularly for the sensing applications. In this work we discussed the source engineered and shape engineered techniques to improve the performance of TFETs, specifically for ammonia gas detection. Comprehensive simulations on SILVACO TCAD and compared the four TFET structures SiGe-pocket DGTFET, SiGe-pocket vertical TFET SiGe-pocket Z-shape TFET, and SiGe-pocket U-shape TFET structure on the basis of various electrical characterization parameters. Significant improvements in efficiency and sensitivity are obtained by adjusting the work function of the molybdenum (4.40–4.60 eV) catalytic gate metal to find the optimal values. The findings reveal that the SiGe-pocket U-shape TFET structure exhibits superior performance, demonstrating an ION of 8.01 × 10−4 A/μm, an ION/IOFF ratio of 1.25×1013, and an OFF current sensitivity (SOFF) of 1.262. These results highlight the enhanced sensitivity and efficacy of the proposed SiGe-pocket U-shape tunnel FET in ammonia gas sensing applications, making it a promising candidate for practical uses in environmental monitoring and industrial safety.