Investigation of the Soft-Magnetic Properties of CoZrTaB Laminated Cores by Dielectric Layer Tuning

Soft magnetic properties of thin films for use as a core material are critical for the realization of future miniaturized electromagnetic devices operating at frequencies of tens or hundreds of megahertz. Laminated stacks consisting of alternate thin layers of magnetic material and dielectric material are widely used to suppress eddy current losses that dominate, especially at a higher frequency of operation. Thus, identifying a suitable dielectric layer, its optimum thickness, and the understanding of its effect on the performance of the laminated core is important. In this letter, six different CoZrTaB (CZTB) laminated cores are reported, featuring a variety of dielectric materials (AlN, SiN, Al ₂ O ₃ , and oxide CZTB) and/or dielectric thickness (5, 15, and 50 nm). This study shows that stacks with different dielectric materials have a varied residual stress that plays an important role in inducing magnetic anisotropy, thus affecting the permeability. CZTB stacks with oxide CZTB dielectric show the best combination of high permeability, low coercivity, and low losses at high frequency.