关于全息和非全息表面形貌获取的思考:极限在哪里?

G. Häusler, F. Willomitzer
{"title":"关于全息和非全息表面形貌获取的思考:极限在哪里?","authors":"G. Häusler, F. Willomitzer","doi":"10.37188/lam.2022.025","DOIUrl":null,"url":null,"abstract":"Recording and (computational) processing of complex wave fields offer a vast realm of new methods for optical 3D metrology. We discuss fundamental similarities and differences between holographic surface topography measurement and non-holographic principles, such as triangulation, classical interferometry, rough surface interferometry, and slope measuring methods. Key features are the physical origin of the ultimate uncertainty limit and how the topographic information is encoded and decoded. Besides the theoretical insight, the discussion will help optical metrologists to determine if their measurement results could be improved or have already hit the ultimate limit of what physics allows.","PeriodicalId":56519,"journal":{"name":"光:先进制造(英文)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"Reflections about the holographic and non-holographic acquisition of surface topography: where are the limits?\",\"authors\":\"G. Häusler, F. Willomitzer\",\"doi\":\"10.37188/lam.2022.025\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Recording and (computational) processing of complex wave fields offer a vast realm of new methods for optical 3D metrology. We discuss fundamental similarities and differences between holographic surface topography measurement and non-holographic principles, such as triangulation, classical interferometry, rough surface interferometry, and slope measuring methods. Key features are the physical origin of the ultimate uncertainty limit and how the topographic information is encoded and decoded. Besides the theoretical insight, the discussion will help optical metrologists to determine if their measurement results could be improved or have already hit the ultimate limit of what physics allows.\",\"PeriodicalId\":56519,\"journal\":{\"name\":\"光:先进制造(英文)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"光:先进制造(英文)\",\"FirstCategoryId\":\"1087\",\"ListUrlMain\":\"https://doi.org/10.37188/lam.2022.025\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"光:先进制造(英文)","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.37188/lam.2022.025","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7

摘要

复杂波场的记录和(计算)处理为光学三维测量提供了广阔的新方法领域。我们讨论了全息表面形貌测量与非全息原理(如三角测量、经典干涉测量、粗糙表面干涉测量和坡度测量方法)之间的基本异同。关键特征是最终不确定性极限的物理起源以及如何对地形信息进行编码和解码。除了理论见解之外,讨论将帮助光学计量学家确定他们的测量结果是否可以改进或已经达到物理允许的最终极限。
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Reflections about the holographic and non-holographic acquisition of surface topography: where are the limits?
Recording and (computational) processing of complex wave fields offer a vast realm of new methods for optical 3D metrology. We discuss fundamental similarities and differences between holographic surface topography measurement and non-holographic principles, such as triangulation, classical interferometry, rough surface interferometry, and slope measuring methods. Key features are the physical origin of the ultimate uncertainty limit and how the topographic information is encoded and decoded. Besides the theoretical insight, the discussion will help optical metrologists to determine if their measurement results could be improved or have already hit the ultimate limit of what physics allows.
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CiteScore
10.90
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