铜- mwcnt复合材料:铜互连击穿的解决方案

B. Kumari, Santhosh Pandranki, Manodipan Sahoo, Rohit Sharma
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摘要

在这项工作中,Cu-MWCNT复合材料被推荐为一种潜在的解决方案,以减少由于自热引起的铜互连击穿。与铜互连相比,Cu-MWCNT复合材料受温度变化的影响小33%。为了支持这一推论,比较了铜和Cu-MWCNT复合材料的横向温度分布,结果表明,与Cu-MWCNT复合材料互连相比,铜互连由于自热而达到更高的温度点。结果表明,Cu-MWCNT复合互连的延迟小于铜互连。同时,Cu-MWCNT复合材料中MWCNT的分数($F_{MWCNT}$)的增加导致延迟降低。Cu-MWCNT复合材料具有较高的F_{MWCNT}$,在所有替代材料中具有较小的噪声延迟积(NDP),使其在信号完整性方面具有优势。Cu-MWCNT复合互连的NDP几乎随温度的升高而恒定,使其不受热效应的影响。MWCNT在击穿功率方面具有最高的可靠性($P_{BD}$),而1 mm长的Cu-MWCNT复合材料($ F_{MWCNT}=0.6$)与铜相比,击穿功率提高了61%。Cu-MWCNT复合互连在NDP/P_{BD}$比值方面优于铜互连,特别是在较长的导线和更高的$F_{MWCNT}$方面。我们的分析建议使用长Cu-MWCNT复合材料(具有$F_{MWCNT}> 0.6$)互连来取代铜互连,作为铜中自热增加导致其击穿的解决方案,并改善信号完整性方面。
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Copper-MWCNT Composite: A Solution to Breakdown in Copper Interconnects
In this work, Cu-MWCNT composite is recommended as a potential solution to diminish breakdown in copper interconnects caused due to self- heating. Cu-MWCNT composite is less affected by temperature variation as compared to copper interconnect by 33%. To support this deduction, lateral temperature profiles of copper and Cu-MWCNT composite are compared which shows that copper interconnect reaches a higher temperature point due to self-heating as compared to Cu-MWCNT composite interconnect. Delay in Cu-MWCNT composite interconnect turned out to be lesser than copper interconnect. Also, increase in the fraction of MWCNT in Cu-MWCNT composite ($F_{MWCNT}$) leads to decrease in delay. Cu-MWCNT composite with higher $F_{MWCNT}$ experiences lesser Noise Delay Product (NDP) among all the alternatives which makes it most advantageous in terms of signal integrity. NDP of Cu-MWCNT composite interconnects are almost constant with increase in temperature making it immune to thermal effects. MWCNT has the highest reliability in terms of breakdown power ($P_{BD}$) while 1 mm long Cu-MWCNT composite (with $F_{MWCNT}=0.6$) when compared to copper has 61% improvement in breakdown power. Cu-MWCNT composite interconnect is much better than copper interconnect specially for longer wire and higher $F_{MWCNT}$ in terms of $NDP/P_{BD}$ ratio. Our analysis recommends long Cu-MWCNT composite (with $F_{MWCNT}> 0.6$) interconnects to replace copper interconnects as a solution to increased self-heating in copper leading to its breakdown and also improvement in signal integrity aspects.
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