一种采用谐振电感耦合的TSV测试探头

R. Rashidzadeh, I. Basith
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引用次数: 2

摘要

本文提出了一种基于谐振电感耦合原理的非接触式TSV探头。当探针与TSV之间的距离为15μm时,TSV数据观测速率可达2Gbps。
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A test probe for TSV using resonant inductive coupling
A contactless TSV probe based on the principle of resonant inductive coupling is presented in this work. The proposed scheme allows TSV data observation up to 2Gbps when the probe and TSV are 15μm apart.
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