气体辅助化学气相输运(CVTG)制备高导电性CdS薄膜

P. Sebastian, A. Sánchez
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引用次数: 1

摘要

本文首次报道了利用载气化学气相输运(CVT)法制备高导电性CdS薄膜。薄膜沉积在管状炉内的石英管中进行。采用CdCl/sub - 2/作为助熔剂的丝网印刷CdS薄膜进行化学气相输运。薄膜的性质取决于冷凝温度、冷却速度、基材位置等参数。外在膜的电导率为10/sup 1/ (/spl Omega/ cm)/sup -1/,内在膜的电导率为10/sup -8/ (/spl Omega/ cm)/sup -1/。设计了新的CVTG系统,并进行了进一步的研究,以获得采用该技术的薄膜太阳能电池结构。
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High conductivity CdS thin films formed by gas assisted chemical vapor transport (CVTG)
Formation of high conductivity CdS thin films by a new chemical vapor transport (CVT) method, employing a carrier gas, is reported for the first time. The film deposition was carried out in a quartz tube kept inside a tubular furnace. The chemical vapor transport was done using a screen printed film of CdS with CdCl/sub 2/ as the flux incorporated in the film. The nature of the film depends on parameters like condensation temperature, cooling rate, substrate position etc. The extrinsic films showed an electrical conductivity of the order of 10/sup 1/ (/spl Omega/ cm)/sup -1/ and the films which showed intrinsic nature exhibited a conductivity of the order of 10/sup -8/ (/spl Omega/ cm)/sup -1/. The new CVTG system is designed and further studies are in progress to obtain thin film solar cell structures employing this technique.
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