微光衰减器的非触觉可靠性测试

2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059) Pub Date : 2000-04-10 DOI:10.1109/RELPHY.2000.843902

C. Rembe, H. Aschemann, S. aus der Wiesche, E. Hofer, H. Debéda, J. Mohr, U. Wallrabe

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引用次数: 3

摘要

本文对一种用于光纤中光传播的开关和衰减的微光电开关进行了可靠性研究。结果表明，高速电影显微成像技术与基于模型的图像序列评价技术是微机电系统(MEMS)动态过程可靠性测试的有力诊断工具。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Nontactile reliability testing of a micro optical attenuator

The reliability investigations presented in this paper have been performed on a micro opto electro mechanical switch developed for switching and attenuation of light propagation in optical fibers. It is demonstrated that high-speed cine photomicrography together with model based evaluation of the image sequences is a powerful diagnostic tool for reliability testing of dynamic processes in micro electro mechanical systems (MEMS).

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2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059)

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