SiC/ sio2界面附近C=C缺陷的第一性原理研究:双键饱和缺陷钝化

N. Tajima
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引用次数: 0

摘要

通过第一性原理计算研究了SiC/SiO2界面附近的C=C缺陷,并证明了通过将C=C双键改为C-C单键可以消除间隙内的缺陷。
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A first principles study on the C=C defects near SiC/SiO 2 interface: Defect passivation by double bond saturation
We performed first principles calculations to study the C=C defects near SiC/SiO2 interface, and demonstrated that the intra-gap defect levels could be removed by changing the C=C double bond to a C-C single bond.
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