标准细胞库符合工艺密度约束的预放置评估

Digvijay Rajurkar, Sivakumar Venkataraman
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引用次数: 0

摘要

提高设计的可制造性和良率要求微芯片设计满足模具中预定义窗口的工艺密度约束。DFM收敛中的迭代对物理验证提出了关键挑战,这在很大程度上取决于标准单元库对过程密度要求的遵从性。提出的新技术包括使用监督强化学习来训练分类器模型,以评估分层密度裕度作为单元面积,过程窗口重叠和块级使用的函数,从而促进易用性。对英特尔10nm节点上的库产品的工艺密度遵从性进行了分析,结果显示,预测失效单元的成功率为85%
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Pre-placement evaluation of Standard Cell Library compliance to Process Density constraints
Improving design manufacturability and yield requires microchip designs to satisfy process density constraints for pre-defined windows in the die. Iterations in DFM convergence poses a key challenge to physical verification which heavily depends on the compliance of standard cell library to process density requirements. The proposed novel technique involves training a classifier model using supervised reinforced learning to evaluate layer wise density margin as a function of cell area, process window overlaps and usage at block-level thus facilitating ease of use. Process density compliance is analyzed for library offerings on Intel 10nm node demonstrating 85% success in predicting failing cells
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