M. Wada, T. Ishikura, D. Nishide, B. Ito, Y. Yamazaki, Tatsuro Saito, A. Isobayashi, M. Kagaya, Takashi Matsumoto, M. Kitamura, A. Sakata, Masahito Watanabe, N. Sakuma, A. Kajita, T. Sakai
{"title":"石墨烯在催化金属大马士革结构上的选择性生长及其在Ni催化剂上的生长机理","authors":"M. Wada, T. Ishikura, D. Nishide, B. Ito, Y. Yamazaki, Tatsuro Saito, A. Isobayashi, M. Kagaya, Takashi Matsumoto, M. Kitamura, A. Sakata, Masahito Watanabe, N. Sakuma, A. Kajita, T. Sakai","doi":"10.1109/IITC.2013.6615599","DOIUrl":null,"url":null,"abstract":"The present work investigated the possibility of the formation of graphene interconnects and studied the behavior of graphene growth in wiring structure. Graphene nucleated on the facet of catalytic metal, and multi layer graphene grew along the terrace surface of catalytic metal. Selective graphene growth served the stacked interconnects structure of graphene / Ni catalytic metal.","PeriodicalId":6377,"journal":{"name":"2013 IEEE International Interconnect Technology Conference - IITC","volume":"46 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2013-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Graphene interconenets selectively grown on catalytic metal damascene structure and its growth mechanism on Ni catalyst\",\"authors\":\"M. Wada, T. Ishikura, D. Nishide, B. Ito, Y. Yamazaki, Tatsuro Saito, A. Isobayashi, M. Kagaya, Takashi Matsumoto, M. Kitamura, A. Sakata, Masahito Watanabe, N. Sakuma, A. Kajita, T. Sakai\",\"doi\":\"10.1109/IITC.2013.6615599\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The present work investigated the possibility of the formation of graphene interconnects and studied the behavior of graphene growth in wiring structure. Graphene nucleated on the facet of catalytic metal, and multi layer graphene grew along the terrace surface of catalytic metal. Selective graphene growth served the stacked interconnects structure of graphene / Ni catalytic metal.\",\"PeriodicalId\":6377,\"journal\":{\"name\":\"2013 IEEE International Interconnect Technology Conference - IITC\",\"volume\":\"46 1\",\"pages\":\"1-3\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-06-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 IEEE International Interconnect Technology Conference - IITC\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IITC.2013.6615599\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE International Interconnect Technology Conference - IITC","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IITC.2013.6615599","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Graphene interconenets selectively grown on catalytic metal damascene structure and its growth mechanism on Ni catalyst
The present work investigated the possibility of the formation of graphene interconnects and studied the behavior of graphene growth in wiring structure. Graphene nucleated on the facet of catalytic metal, and multi layer graphene grew along the terrace surface of catalytic metal. Selective graphene growth served the stacked interconnects structure of graphene / Ni catalytic metal.
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