利用双层钨纳米晶增强短通道非易失性存储器件的记忆窗口

S. Samanta, P.K. Singh, W. Yoo, G. Samudra, Y. Yeo, L. Bera, N. Balasubramanian
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引用次数: 31

摘要

本文首次报道了采用双W纳米晶嵌入HfAlO的下一代存储应用,在栅极长度低至100 nm的小型器件上具有存储器增强特性和良好的保留性能,并且具有两位操作的可行性。双层器件显示出随缩放而增加的内存窗口,这将是非常有益的
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Enhancement of memory window in short channel non-volatile memory devices using double layer tungsten nanocrystals
This paper for the first time, reports the memory enhancement characteristics and good retention with feasibility of two-bit operation of small scale devices with gate length down to 100 nm, using double layer W nanocrystals embedded in HfAlO for the next generation memory application. Double layer device shows increasing memory window with scaling which will be extremely beneficial
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