嵌入式高k电荷阱多时间可编程存储器,可扩展至14nm FIN,无需增加工艺复杂性

Janakiraman Viraraghavan, D. Leu, Balaji Jayaraman, A. Cestero, Robert Kilker, M. Yin, J. Golz, R. R. Tummuru, Ramesh Raghavan, D. Moy, Thejas Kempanna, F. Khan, T. Kirihata, S. Iyer
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引用次数: 11

摘要

80Kb逻辑嵌入式多时间可编程存储器(MTPM)在32nm/22nm高k晶体管中采用电荷捕获和释放行为,不会增加工艺复杂性。具有覆盖保护的多步验证采用块写入和信号裕度退化(~30%),以满足105°C下10年的保留。
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80Kb 10ns read cycle logic Embedded High-K charge trap Multi-Time-Programmable Memory scalable to 14nm FIN with no added process complexity
An 80Kb logic Embedded Multi-Time Programmable Memory (MTPM) employs charge trapping and de-trapping behavior in 32nm/22nm High-K transistor, resulting in no added process complexity. Multi-step verification with overwrite protection employs block-write and signal margin degradation (~30%) to satisfy 10 year retention at 105° C.
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