S. Vollebregt, H. Schellevis, K. Beenakker, R. Ishihara
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Carbon nanotube vias fabricated at back-end of line compatible temperature using a novel CoAl catalyst
Vertically aligned carbon nanotubes (CNT) were fabricated using a novel CoAlcatalyst at substrate temperatures as low as 350°C and analysed using Raman spectroscopy. Electrical measurement structures were fabricated and characterized using CNT bundles grown at 400°C. The resulting I-V characteristics display a slight non-linearity, likely due to a nonoptimal top contact. The first measurement results indicate CoAl can be an attractive candidate for back-end integration of CNT.
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