两步硒化法快速制备Cu(In,Ga)Se2薄膜

S. Ishizuka, L. Mansfield, C. Dehart, M. Scott, B. To, M. Young, B. Egaas, R. Noufi
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引用次数: 3

摘要

目前用于工业Cu(In,Ga)Se2 (CIGS)模块生产的两步工艺需要几个小时的长时间来形成CIGS吸收剂。本文研究了在单质硒蒸气中叠置金属前驱体快速硒化的反应途径。目的是了解反应动力学,寻找最佳前驱体结构和最佳硒化条件,以形成具有合适Ga深度分布的高质量CIGS膜。除了堆叠金属前体外,还研究了含硒前体的使用效果。正如预期的那样,金属前驱体的堆叠顺序影响所得cigs吸收剂的性能。沉积在前驱体中的铜的数量对最终的薄膜和电池性能也有很大的影响。我们还发现,即使在[Cu]/([In] + [Ga]) < 1的条件下,使用特定的前驱体结构和硒化条件,也可以形成具有大晶粒尺寸和平坦Ga深度分布的CIGS薄膜。结果表明,硒化反应途径可以由前驱体结构决定,通过修饰前驱体结构来控制反应动力学,有望进一步改善反应过程。
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Rapid fabrication of Cu(In,Ga)Se2 thin films by the two-step selenization process
Two-step processes currently used for the industrial Cu(In,Ga)Se2 (CIGS) module production require a long process time of several hours for the CIGS absorber formation. In this paper, we are studying the reaction pathway to rapid selenization of stacked metal precursors in elemental Se vapor. The objective is to understand the reaction kinetics to find the best precursor structure and the optimal selenization conditions to form high-quality CIGS films with proper Ga depth profiles. In addition to stacked metal precursors, the effect of the use of Se-containing precursors was also examined. As expected, the stacking order of themetal precursors influences the properties of the resultingCIGS absorbers. The Cu amount deposited for the precursor formation critically affected the final film and cell properties, as well.We also found that the formation of CIGS films with large grain sizes and flat Ga depth profiles was possible even for [Cu]/([In] + [Ga]) < 1 conditions with the use of particular precursor structures and selenization conditions. The results suggest that the selenization reaction pathway can be dictated with the precursor structure, and further improvements are expected by controlling reaction kinetics with precursor structure modification.
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