p型无结栅全能纳米线晶体管的特性和灵敏度

Ming-Hung Han, Y. Jhan, Jia-Jiun Wu, Hung-Bin Chen, Yung-Chun Wu, Chun-Yen Chang
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引用次数: 0

摘要

在这项研究中,我们首次使用3D量子输运器件模拟CMOS技术实现评估p型无结(JL)栅极周围(GAA)纳米线晶体管的特性和灵敏度。由于硼在硅中的固溶性,p型无结纳米线晶体管的掺杂浓度不如n型器件高,因此可以采用中隙栅电极材料,在适当的阈值电压下制备。与传统的倒转模式GAA结构相比,p型JLGAA晶体管具有良好的通断电流比和更好的短通道特性。灵敏度分析表明,通道厚度对器件的阈值电压(Vth)、导通电流(Ion)和关断电流(Ioff)等性能有显著影响。相比之下,由于对短通道效应的良好控制,通道长度和氧化物厚度的影响较小。
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Characteristics and sensitivity of p-type junctionless gate-all-around nanowire transistor
In this study, we for the first time assess the characteristics and sensitivity of p-type junctionless (JL) gate-all around (GAA) nanowire transistor using 3D quantum transport device simulation for CMOS technology implementation. Since the doping concentration of p-type junctionless nanowire transistor does not as high as in n-type device due solid solubility of boron in silicon, it can be made by using midgap gate electrode material for appropriate threshold voltage. The p-type JLGAA transistor shows good on/off current ratio and better short channel characteristics compare to conventional inversion mode GAA structure. The sensitivity analyses show that the channel thickness affects the device performance such as threshold voltage (Vth), on current (Ion), and off current (Ioff) significantly. In contrast, the channel length and oxide thickness have less impact owing to well control of short channel effect.
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