{"title":"带有数字输出的单片表面微加工z轴陀螺仪","authors":"Xuesong Jiang, J. Seeger, M. Kraft, B. Boser","doi":"10.1109/VLSIC.2000.852839","DOIUrl":null,"url":null,"abstract":"A monolithic surface micromachined Z-axis vibratory rate gyroscope with an on-chip A/D converter is fabricated in a monolithic MEMS/circuits technology with 2 /spl mu/m CMOS and 2.25 /spl mu/m-thick mechanical polysilicon. The on-chip position sense circuit uses correlated double sampling to reject 1/f and kT/C noise and resolves 0.02 angstrom displacements. The gyroscope achieves a noise floor of 3/spl deg//sec//spl radic/Hz at atmospheric pressure and operates from a single 5 V supply.","PeriodicalId":6361,"journal":{"name":"2000 Symposium on VLSI Circuits. Digest of Technical Papers (Cat. No.00CH37103)","volume":"33 1","pages":"16-19"},"PeriodicalIF":0.0000,"publicationDate":"2000-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"121","resultStr":"{\"title\":\"A monolithic surface micromachined Z-axis gyroscope with digital output\",\"authors\":\"Xuesong Jiang, J. Seeger, M. Kraft, B. Boser\",\"doi\":\"10.1109/VLSIC.2000.852839\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A monolithic surface micromachined Z-axis vibratory rate gyroscope with an on-chip A/D converter is fabricated in a monolithic MEMS/circuits technology with 2 /spl mu/m CMOS and 2.25 /spl mu/m-thick mechanical polysilicon. The on-chip position sense circuit uses correlated double sampling to reject 1/f and kT/C noise and resolves 0.02 angstrom displacements. The gyroscope achieves a noise floor of 3/spl deg//sec//spl radic/Hz at atmospheric pressure and operates from a single 5 V supply.\",\"PeriodicalId\":6361,\"journal\":{\"name\":\"2000 Symposium on VLSI Circuits. Digest of Technical Papers (Cat. No.00CH37103)\",\"volume\":\"33 1\",\"pages\":\"16-19\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-06-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"121\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2000 Symposium on VLSI Circuits. Digest of Technical Papers (Cat. No.00CH37103)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/VLSIC.2000.852839\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 Symposium on VLSI Circuits. Digest of Technical Papers (Cat. No.00CH37103)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/VLSIC.2000.852839","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 121
摘要
采用2 /spl μ m CMOS和2.25 /spl μ m厚度的机械多晶硅，采用单片MEMS/电路技术制备了带片上A/D转换器的单片表面微加工z轴振动速率陀螺仪。片上位置检测电路采用相关双采样来抑制1/f和kT/C噪声，并解析0.02埃位移。陀螺仪在大气压下实现3/声压度//秒//声压径向/Hz的噪声底限，并从单个5 V电源工作。
A monolithic surface micromachined Z-axis gyroscope with digital output
A monolithic surface micromachined Z-axis vibratory rate gyroscope with an on-chip A/D converter is fabricated in a monolithic MEMS/circuits technology with 2 /spl mu/m CMOS and 2.25 /spl mu/m-thick mechanical polysilicon. The on-chip position sense circuit uses correlated double sampling to reject 1/f and kT/C noise and resolves 0.02 angstrom displacements. The gyroscope achieves a noise floor of 3/spl deg//sec//spl radic/Hz at atmospheric pressure and operates from a single 5 V supply.
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