常压等离子体增强化学气相沉积(APPECVD)系统的电子和光学特性

L. Oksuz, A. Gulec, K. Ozaltin, K. Akkaya, G. Erkmen, A. Uygun
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引用次数: 0

摘要

针对等离子体增强化学气相沉积和复合材料沉积的需要,研制了具有1356 MHz射频电源和匹配单元的介质阻挡大气压等离子体放电系统。通过自制的匹配电路,对等离子体系统进行了最大功率传输优化,在氦气和氩气流动下获得了均匀的辉光放电。在有和没有单体流入系统的情况下,对光学、侵入性电探针和非侵入性电特性进行了检查。时间分辨的ICCD图片和电特性将给出是否引入单体系统进行聚合。
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Eletronical and optical characteristics of atmospheric pressure plasma enhanced chemical vapor deposition (APPECVD) system
A dielectric barrier atmospheric pressure plasma discharge system with 13,56 MHz rf power supply and matching unit is built for plasma enhanced chemical vapor and composite deposition purposes. Plasma system is optimized for maximum power transfer by homemade matching circuit and uniform glow discharge is obtained with helium and argon flow. The optical, invasive electrical probe and noninvasive electrical characteristics are examined with and without monomer flow to the system. Time resolved ICCD pictures and electrical characteristics will be given with and without of monomers introduced to the system for polymerization.
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