功率半导体器件封装用银颗粒导电浆料的研究

Jianwen Zhou, Gang Li, Pengli Zhu, R. Sun, C. Wong
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引用次数: 0

摘要

近年来,烧结银被用作电力电子元件的互连材料。在开发初期,银导电浆料采用微米级的银颗粒,但要实现高性能的烧结接头,需要高达40 MPa的高温和高压,这可能会损坏电气元件。因此,利用银纳米颗粒进行低压烧结受到了极大的关注。在我们的工作中,我们评估了银纳米颗粒导电浆料作为低温、低压互连材料的性能。抗剪强度试验表明,负载60%wt Ag的银浆在10MPa下烧结20min,在10min、20min、30min和40min中效果最好。随着烧结压力的增大,Cu-Cu接头明显增多。银含量也是影响抗剪强度的重要因素。当含银量从60%wt增加到80%wt时,抗剪强度同时提高。剪切试验结果表明,在300℃、10MP、80wt% Ag载荷下,纳米银导电浆料的抗剪强度可达57MPa,表明纳米银导电浆料具有优良的力学性能。
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Study on conductive paste of silver particles for power semiconductor devices package
Sintered silver has been used as an interconnect material for power electronic components in recent years. In the early days of development, micron-sized Ag particles were used for the silver conductive paste, however, high temperature and high pressures of up to 40 MPa were needed to achieve high performance sintered joints, which may damage the electrical component.Therefore,low pressure sintering using Ag nanoparticles has received great interest. In our work, we evaluated the properties of the silver nanoparticle conductive paste as a low-temperature, low-pressure interconnect material. Shear strength test showed that the silver paste with 60%wt Ag loading sintered under 10MPa for 20 min can achieve the best result among 10min, 20min, 30min and 40min.Moreover, as the sintering pressure increases, Cu-Cu joints clearly increased. Silver content is also an important factor affecting the shear strength. When we increase the silver loading from 60%wt to 80%wt, shear strength increases simultaneous. Shear test results show that a high shear strength of 57MPa can be achieved for the 80wt% Ag loading under 10MP at 300° C. which indicates that our silver nanoparticle conductive paste has excellent mechanical properties.
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