紫外辅助MOCVD-ZnO:B和溅射沉积ZnO:Al窗口层ZnS(O,OH)/CIGS太阳能电池性能的比较

Taizou Kobayashi, K. Yamauchi, T. Nakada
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引用次数: 0

摘要

将紫外光辅助金属有机化学气相沉积法(UM-ZnO:B)制备的ZnO:B薄膜应用于CBD-ZnS(O,OH)/CIGS太阳能电池,以消除后续ZnO溅射过程中的等离子体损伤。验证了UM-ZnO:B窗口层的CIGS太阳能电池的转换效率高于溅射沉积(Sp-) ZnO:Al窗口层的器件;在这两种情况下,都使用了厚(120 nm)和薄(10 nm)的ZnS(O,OH)缓冲层。采用厚ZnS(O,OH) (120nm)缓冲层,用UM-ZnO:B窗口层替代Sp-ZnO:Al后,CIGS太阳能电池的转换效率从16.3%提高到17.5%。值得注意的是,即使使用超薄ZnS(O,OH) (10nm)缓冲层,通过更换窗口层,转换效率也从0.2%显著提高到15.6%。开路电压的温度依赖性表明,UM-ZnO: B窗口层的使用减少了界面复合。
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Comparison of cell performance of ZnS(O,OH)/CIGS solar cells with UV-assisted MOCVD-ZnO:B and sputter-deposited ZnO:Al window layers
ZnO:B films deposited by ultraviolet light-assisted metal organic chemical vapor deposition (UM-ZnO:B) were applied to CBD-ZnS(O,OH)/CIGS solar cells in order to eliminate plasma damages during the subsequent ZnO sputtering. It was verified that the conversion efficiency of CIGS solar cells with a UM-ZnO:B window layer was higher than that of the device with a sputter-deposited(Sp-) ZnO:Al window layer; in both cases, thick (120 nm) and thin (10 nm) ZnS(O,OH) buffer layers were used. The conversion efficiency of CIGS solar cell was improved from 16.3% to 17.5% upon replacement of the Sp-ZnO:Al by a UM-ZnO:B window layer when the thick ZnS(O,OH) (120nm) buffer layer was used. Notably, the conversion efficiency was remarkably improved from 0.2% to 15.6% by the replacement of the window layer even when the ultra thin ZnS(O,OH) (10nm) buffer layer was used. The temperature dependence of open-circuit voltage revealed that interface recombination decreased owing to the use of a UM-ZnO: B window layer.
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