pecvd -氮化氧气相色谱柱

IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest. Pub Date : 2005-12-05 DOI:10.1109/IEDM.2005.1609334

M. Agah, K. Wise

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引用次数: 2

摘要

本文介绍了用于便携式气体分析系统的低功率高速微型气相色谱柱的实现。25厘米长的超低质量MEMS柱，采用无应力pecvd -氧氮化膜在cmos兼容工艺中制造，允许正构烷烃气体混合物的高性能分离，能够进行多秒分析，并且在150℃的真空中耗散小于10mW

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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PECVD-oxynitride gas chromatographic columns

This paper describes the realization of low-power high-speed micro gas chromatography columns for portable gas analysis systems. The 25cm-long ultra-low-mass MEMS columns, fabricated using stress-free PECVD-oxynitride films in a CMOS-compatible process, allow high-performance separations of n-alkane gas mixtures, are capable of multi-second analysis, and can dissipate less than 10mW at 150degC in vacuum

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IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest.

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