hfox基RRAM的单极和双极电阻开关效应共存

B. Chen, B. Gao, Y. Fu, R. Liu, L. Ma, P. Huang, F. Zhang, L. Liu, X. Liu, J. Kang, G. Lian
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引用次数: 4

摘要

在TaTiN/HfOx/Pt结构RRAM器件中,展示和研究了单极和双极电阻开关行为。提出了一种基于贫电子氧空位(VO2+)与TaTiN电极释放的氧离子(O2-)复合的物理模型,以阐明双极和单极共存的电阻开关效应。在提出的物理模型中,焦耳加热控制的O2-分解和电场控制的O2-漂移分别主导了单极和双极电阻开关行为。
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Co-existed unipolar and bipolar resistive switching effect of HfOx-based RRAM
Both unipolar and bipolar resistive switching behaviors are demonstrated and investigated in the TaTiN/HfOx/Pt structured RRAM devices. A physical model based on the recombination among the electron-depleted oxygen vacancies (VO2+) and the oxygen ions (O2-) released from the TaTiN electrode is proposed to clarify the co-existed bipolar and unipolar resistive switching effect. In the proposed physical model, Joule heating controlled O2- decomposition and electric-field controlled O2- drift dominate the unipolar and bipolar resistive switching behaviors, respectively.
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