基于p岛层的功率UMOSFET单事件烧坏硬化技术仿真研究

S. Krishnamurthy, R. Kannan, F. Azmadi Hussin
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摘要

本文采用TCAD仿真方法研究了具有p型岛的Power U型金属氧化物半导体场效应晶体管(p岛Power UMOSFET),以确定其对单事件烧毁(SEB)的灵敏度。在漂移区,p型埋岛抑制了海沟底部强电场,防止了SEB的发生。为了设计合适的器件,研究了掺杂浓度、p岛厚度、长度和位置对击穿电压和阈值电压的影响。使用优化的p岛参数,加固后的PI-UMOS获得与标准UMOSFET相同的电气特性。SEB模拟结果表明,与标准结构相比,硬化结构中的电场减小了60.12%,SEB的生存能力也大幅提高了约30.1%。因此,具有p岛的功率UMOSFET为空间和大气应用提供了高SEB生存能力。
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Simulation Study of Single Event Burnout Hardening Technique on Power UMOSFET Using P-island Layer
In this work, TCAD simulation has been applied to study the Power U- shape metal-oxide-semiconductor field- effect transistor (P-island Power UMOSFET) with p-type islands to determine its sensitivity to Single Event Burnout (SEB). In the drift area, the p-type buried islands suppress the strong electric field at the bottom of the trench and prevent SEB. For the appropriate device design, the effect of doping concentration, thickness, length, and position of the p-islands on the breakdown voltage and the threshold voltage is studied. Using optimized parameters for the P-island, the hardened PI-UMOS obtains unchanged electrical characteristics from the standard UMOSFET. The outcome of the SEB simulations shows that the electrical field in the hardened structure is decreased by 60.12% relative to a standard structure and that the survivability of the SEB has also improved substantially by about 30.1%. Hence, Power UMOSFET with P-islands offers high SEB survivability for space and atmospheric applications.
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